2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS) 2017
DOI: 10.1109/edaps.2017.8277019
|View full text |Cite
|
Sign up to set email alerts
|

Novel LC resonant clocking for 3D IC using TSV-inductor and capacitor

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2019
2019
2024
2024

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(1 citation statement)
references
References 10 publications
0
1
0
Order By: Relevance
“…The possibility of making TSV-based capacitor successful depends on the structure of TSV that has an inner copper encompassed by silicon dioxide. The function of silicon dioxide is to insulate the copper from the silicon substrate [15,16,17,18]. The topology structure of TSV arrays given in Fig.…”
Section: The Tsv Array Capacitor and Planar Spiral Inductormentioning
confidence: 99%
“…The possibility of making TSV-based capacitor successful depends on the structure of TSV that has an inner copper encompassed by silicon dioxide. The function of silicon dioxide is to insulate the copper from the silicon substrate [15,16,17,18]. The topology structure of TSV arrays given in Fig.…”
Section: The Tsv Array Capacitor and Planar Spiral Inductormentioning
confidence: 99%