Novel gas aggregation cluster source based on post magnetron

Abstract

In this communication, a new gas aggregation cluster source is introduced equipped with post cylindrical magnetron. The rotation of magnetic circuit improves the usage of cylindrical copper target in terms of its homogenous consumption. Copper nanoparticles were successfully synthesized. Their deposition rate fluctuates at slow rotations of magnetic circuit. Cyclic trapping and release of nanoparticles from electrostatic capture zones are likely responsible for this effect. The instabilities are not observed at higher rotation speeds. The argon flow is found to be very complex within the cluster source; however, it seems crucial for its operation. The efficiency of transport of nanoparticles and their size increase with gas flow. The highest values of deposition rate of around 19 mg/h are obtained.

Gas-phase synthesis of nanoparticles: current application challenges and instrumentation development responses

“…In an analogous fashion, more recently Nikitin et al utilised a similar principle as the FFE by introducing their post cylindrical magnetron with a rotating magnetic circuit. 86 The twist in their design was that the magnetic circuit, which was attached to a rotating spindle placed inside the magnetron, was rectangular, with the two different-length sides generating two elliptical magnetic tunnels shifted by 180°. Just like the FFE, target erosion was significantly reduced, maximising target usage and minimising possible related instabilities.…”

In Situ Laser Light Scattering for Temporally and Locally Resolved Studies on Nanoparticle Trapping in a Gas Aggregation Source

“…This is in line with earlier reports on trapping of NPs inside the GAS. [33,34,[36][37][38] In these earlier studies, techniques like in situ UV-Vis or in situ SAX were used to analyze the growth and transport of NPs. These techniques average data out of the whole interaction volume of the light beam or X-ray beam.…”

“…CFD simulations have shown, that the velocity is always highest at the inlet and the outlet orifice. [32][33][34][35][36] In regions, which are not in the direct path between inlet and outlet the velocity is small. For the normal configuration, a low velocity at the edge regions can be assumed.…”

“…The simulations have also shown that the highest velocity was always found at the inlet and outlet of the gas. [32][33][34][35][36] Since the gas inlet position was varied, a different gas velocity distribution is expected for all gas inlet configurations. This can cause different release probabilities for the trapped NPs in the GAS.…”

“…the gas flow pattern inside a GAS plays a crucial role. [32][33][34][35][36] For example if low-velocity regions are present inside a GAS, NPs can get lost in the chamber walls or the target. [36] This effect strongly impacts the material conversion efficiency of a GAS.…”