2020
DOI: 10.1109/jphotov.2020.3014858
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Novel Double Acidic Texturing Process for Saw-Damage-Free Kerfless Multicrystalline Silicon Wafers

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Cited by 8 publications
(4 citation statements)
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“…The etched surface and the time depend etching process plays an important role. [30,31] Since the previous studies on the mechanisms of silicon etching in HF-HNO 3 -based solutions were reported by Robbins and Schwartz in 1959-1961 [32][33][34] and by K. Kim in 1960, [22] it has been accepted recently that silicon etching in the HF:HNO 3 system is mainly governed by the following reactions…”
Section: Etching Mechanismmentioning
confidence: 99%
“…The etched surface and the time depend etching process plays an important role. [30,31] Since the previous studies on the mechanisms of silicon etching in HF-HNO 3 -based solutions were reported by Robbins and Schwartz in 1959-1961 [32][33][34] and by K. Kim in 1960, [22] it has been accepted recently that silicon etching in the HF:HNO 3 system is mainly governed by the following reactions…”
Section: Etching Mechanismmentioning
confidence: 99%
“…Equation (2) was used to calculate the value of weighted average reflectance (R w ) using the reflectance measured via UV-Vis spectroscopy [16,17].…”
Section: Variation In Surface Reflectancementioning
confidence: 99%
“…Chemical etching involves the selective removal of silicon from the wafer surface using acidic [4]- [9] or alkaline [10]- [15] solutions. By controlling the etchant composition, concentration, and temperature, researchers can precisely engineer the morphology of the resulting pyramidal structures.…”
Section: Introductionmentioning
confidence: 99%