2001
DOI: 10.1088/0954-0083/13/1/301
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Novel Crosslinking Method for Negative Tone Photoresist having Pendant Carboxyl Moieties

Abstract: We have developed a novel photo-crosslinking method for the negative tone photoresist comprising binder resins with pendant carboxyl groups. A series of copolymers have been synthesized deriving from methacrylic acid, methyl methacrylate, n-butyl methacrylate, and α-methacryloxy-γ -butyrolactone with various feed molar ratios. The existence of lactonic methacrylate units in copolymers was found to increase the sensitivity of the photoresist. Increasing photosensitivity was investigated by using a model compoun… Show more

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Cited by 6 publications
(2 citation statements)
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References 9 publications
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“…We hypothesized that HF diffusion was the dominant reason for pits and that the hydrophobicity of the dehydrated PR could prevent outcomes effectively. Through the thermal curing at a high temperature, dehydration and cross-linking arose and the hydrophilicity of the PR decreased significantly [30,31]. Instead of thick Au film, the cured PR was expected effectively to prevent the creation of pits.…”
Section: Effect Of Curing Of the Photoresistmentioning
confidence: 99%
See 1 more Smart Citation
“…We hypothesized that HF diffusion was the dominant reason for pits and that the hydrophobicity of the dehydrated PR could prevent outcomes effectively. Through the thermal curing at a high temperature, dehydration and cross-linking arose and the hydrophilicity of the PR decreased significantly [30,31]. Instead of thick Au film, the cured PR was expected effectively to prevent the creation of pits.…”
Section: Effect Of Curing Of the Photoresistmentioning
confidence: 99%
“…Compared to uncured PR, 5 min of curing time removed 36% of the pits, 10 min removed 77% These results suggest that the curing process transformed the property of the PR from hydrophilic to the hydrophobic, and blocked the diffusion of the hydrophilic HF solution and the Cr/Au etchants. Baking of the PR at a high temperature was reported to trigger the cross-linking of the carboxyl group, cause dehydration and increase the hydrophobicity of the PR dramatically [30,31]. The hydrophobic cured PR appeared to block the diffusion of HF and of the Cr and Au etchants effectively.…”
Section: Curing Timementioning
confidence: 99%