Novel Conception of a Tunable RF MEMS Resonator

Jmai, Bassem; Rajhi, Adnen; Gharsallah, Ali

doi:10.14569/ijacsa.2017.080111

Cited by 5 publications

(3 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In this study, an improvement of the capacitive RF MEMS structure is proposed in order to obtain a reconfigurable resonator. Figure 11 shows the suggested RF MEMS resonator structure [23].…”

Section: Mems-based Reconfigurable Resonatormentioning

confidence: 99%

Study and Design of Reconfigurable Wireless and Radio- Frequency Components Based on RF MEMS for Low-Power Applications

Jmai¹,

Rajhi²,

Mendes³

et al. 2018

MEMS Sensors - Design and Application

Self Cite

View full text Add to dashboard Cite

This chapter intends to deal with the challenging field of communication systems known as reconfigurable radio-frequency systems. Mainly, it will present and analyze the design of different reconfigurable components based on radio-frequency microelectromechanical systems (RF MEMS) for different applications. This chapter will start with the description of the attractive properties that RF MEMS structures offer, giving flexibility in the RF systems design, and how these properties may be used for the design of reconfigurable RF MEMS-based devices. Then, the chapter will discuss the design, modeling, and simulation of reconfigurable components based on both theoretical modeling and well-known electromagnetic computing tools such as ADS, CST-MWS, and HFSS to evaluate the performance of such devices. Finally, the chapter will deal with the design and performance assessment of RF MEMS-based devices. Non-radiating devices, such as phase shifter and resonators, which are very important components in the hardware RF boards, will be addressed. Also, three types of frequency reconfigurable antennas, for the three different applications (radar, satellite, and wireless communication), will be proposed and evaluated. From this study, based on theoretical design and electromagnetic computing evaluation, it has been shown that RF MEMS-based devices can be an enabling solution in the design of the multiband reconfigurable radio-frequency devices.

show abstract

Section: Mems-based Reconfigurable Resonatormentioning

confidence: 99%

Study and Design of Reconfigurable Wireless and Radio- Frequency Components Based on RF MEMS for Low-Power Applications

Jmai¹,

Rajhi²,

Mendes³

et al. 2018

MEMS Sensors - Design and Application

Self Cite

View full text Add to dashboard Cite

show abstract

“…We propose in [19] the structure of the Figure 1. This RF-MEMS resonator has a small dimension (1200x900x681) µm 3 and it is built with multilayer configuration as shown in Table 1.…”

Section: A Conception Of the Proposed Resonatormentioning

confidence: 99%

A Novel Reconfigurable MMIC Antenna with RF-MEMS Resonator for Radar Application at K and Ka Bands

Jmai¹,

Gahgouh²,

Gharsallah³

2017

ijacsa

Self Cite

View full text Add to dashboard Cite

“…RF-MEMS resonators have been used for many applications, ranging from acoustic filters used for communication systems to timing application, owing to their excellent power handling capability and low motional resistance [1][2][3][4][5]. These merits are associated with piezoelectric transduction, which offers strong electromechanical coupling, and the use of substrate materials that have a low intrinsic damping and high energy density, such as single-crystal silicon (SCS) [1].…”

Section: Introductionmentioning

confidence: 99%

Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

Workie

Tang

et al. 2022

Micromachines

View full text Add to dashboard Cite

This paper examines a new technique to improve the figure of merit of laterally vibrating RF-MEMS resonators through an energy-preserving suspended addendum frame structure using finite element analysis. The proposed suspended addendum frame on the sides of the resonant plate helps as a mechanical vibration isolator from the supporting substrate. This enables the resonator to have a low acoustic energy loss, resulting in a higher quality factor. The simulated attenuation characteristics of the suspended addendum frame are up to an order of magnitude larger than those achieved with the conventional structure. Even though the deployed technique does not have a significant impact on increasing the effective electromechanical coupling coefficient, due to a gigantic improvement in the unloaded quality factor, from 4106 to 51,136, the resonator with the suspended frame achieved an 11-folds improvement in the figure of merit compared to that of the conventional resonator. Moreover, the insertion loss was improved from 5 dB down to a value as low as 0.7 dB. Furthermore, a method of suppressing spurious mode is demonstrated to remove the one incurred by the reflected waves due to the proposed energy-preserving structure.

show abstract

Novel Conception of a Tunable RF MEMS Resonator

Cited by 5 publications

References 15 publications

Study and Design of Reconfigurable Wireless and Radio- Frequency Components Based on RF MEMS for Low-Power Applications

Study and Design of Reconfigurable Wireless and Radio- Frequency Components Based on RF MEMS for Low-Power Applications

A Novel Reconfigurable MMIC Antenna with RF-MEMS Resonator for Radar Application at K and Ka Bands

Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

Contact Info

Product

Resources

About