2008
DOI: 10.1016/j.apsusc.2008.08.093
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Novel ceria–polymer microcomposites for chemical mechanical polishing

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Cited by 42 publications
(14 citation statements)
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“…CeO 2 is one of the most important rare-earth oxides, having numerous applications, such as in catalysis [11], fuel cells [12], polishing materials [13], oxygen gas sensors [14], optical devices [15]. Thus, nanocrystalline ceria has an important role in enhancing macroscopic properties, using its aliovalent tendency, tailoring crystallite sizes, and manipulating the surface area for these applications [16,17].…”
Section: Introductionmentioning
confidence: 99%
“…CeO 2 is one of the most important rare-earth oxides, having numerous applications, such as in catalysis [11], fuel cells [12], polishing materials [13], oxygen gas sensors [14], optical devices [15]. Thus, nanocrystalline ceria has an important role in enhancing macroscopic properties, using its aliovalent tendency, tailoring crystallite sizes, and manipulating the surface area for these applications [16,17].…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5] CeO 2 has been used as an industrial catalyst for three-way catalysis (TWC) and the fluid catalytic cracking (FCC) process. [6][7][8] Ceria can be used as a polishing agent in the microelectronic industry for chemical mechanical planarization (CMP) 9,10 and as an oxygen ion conductor in solid oxide fuel cells, 11 amperometric oxygen monitors, 12 and oxygen pumps. 13 Ceria also finds other uses as luminescent material, 14 in gas sensors, 15 sunscreen cosmetics, 16 etc.…”
Section: Introductionmentioning
confidence: 99%
“…A wide range of nanoparticles, such as carbon-based [18], ceramic [19], and metallic nanomaterials [20] can be incorporated/embedded within the hydrogel structure to obtain nanocomposites with tailored functionality [21]. Nanocomposite hydrogels, also known as hybrid hydrogels, are highly hydrated polymeric networks, either physically or covalently crosslinked with nanoparticles [22,23].…”
Section: Introductionmentioning
confidence: 99%