“…They can be used as structure ceramics, 6 as wear-protection and corrosion-resistant hard coatings, 7 for oxidation protection, 8 as micro-electromechnical parts (MEMS), 9 as wide bandgap blue-ultraviolet opto-electronic devices, 10 as tunable electrical conductors, 11 as sensors, 10 as novel magnetic materials, 12 as biomedical implants, 13 for fuel reforming, 14 and as negative electrodes in Li ion batteries. 15 Si-C-N materials can be produced by a variety of methods like polymer pyrolysis, 1,2 laser deposition, 16 ion-implantation, 17 and magnetron sputtering 18,19 in form of bulk materials and thin films. After synthesis Si-C-N materials are generally in a complex amorphous state, showing interesting features like nanometer scale phase separation, 20 transitions to new ternary crystalline compounds 2,21,46 or also metastable structures.…”