“…Secondly, a noticeable large number of micropumps-perhaps even the majority-are designed for life science applications. Here, small volumes have to be displaced for applications such as drug delivery systems, micro-total-analysis systems (µTAS) or biochips [9,[13][14][15][16][17][18][19][20][25][26][27][28][29][30][31][32][33][34][35]. For these applications, micropumps are predestinated due to their small size, precise metering capability, small power consumption and ability of system integration.…”