Novel 8-inch wafer scale process for low cost production of back side illuminated (BSI) imaging sensors

Joshi, Atul; Chiaverini, David J.; Kashyap, Sachin; Madhugiri, Vishwanath; Patti, Robert; Hong, Seon-Eui; Lesser, Michael P.

doi:10.1117/12.2588181

Image Sensing Technologies: Materials, Devices, Systems, and Applications VIII 2021

DOI: 10.1117/12.2588181

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Novel 8-inch wafer scale process for low cost production of back side illuminated (BSI) imaging sensors

Atul Joshi

David J. Chiaverini

Sachin Kashyap

et al.

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Novel 8-inch wafer scale process for low cost production of back side illuminated (BSI) imaging sensors

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