Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology

Gehner, Andreas; Dürr, Peter; Kunze, Detlef; Rudloff, D.; Elgner, Andreas; Heber, Joerg; Francés, S.; Skupsch, Christoph; Torlee, H.; Eckert, M.; Friedrichs, Martin; Schmidt, Jochen; Pufe, W.; Döring, Sebastian; Hohle, Christoph; Schulze, Matthias; Wagner, Michael

doi:10.1109/omn.2018.8454624

Cited by 5 publications

(2 citation statements)

References 3 publications

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“…The output beams are diffraction limited and can fully support the theoretical number of resolvable spots of 160 × 160. To overcome the pin-count limit, the MEMS OPA can be fabricated on a CMOS wafers to integrate the addressing electronics, as demonstrated in commercial digital light processing (DLP) projectors [33] and micromirror arrays for wavefront control [34]. Lower temperature MEMS materials such as low-stress metals [33,34] or polycrystalline silicon-germaniums [35] are compatible with postprocessing of CMOS wafers.…”

Section: Resultsmentioning

confidence: 99%

2D broadband beamsteering with large-scale MEMS optical phased array

Wang

Zhou

Zhang

et al. 2019

Optica

141

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Optical-phased arrays (OPAs) enable complex beamforming, random-access beam pointing, and simultaneous scan and tracking of multiple targets by controlling the phases of two-dimensional (2D) coherent emitters. So far, no OPA can achieve all desirable features including large 2D arrays, high optical efficiency, wideband operation in wavelengths, fast response time, and large steering angles at the same time. Here, we report on a large-scale 2D OPA with novel microelectro-mechanical-system (MEMS)-actuated phase shifters. Wavelength-independent phase shifts are realized by physically moving a grating element in the lateral direction. The OPA has 160 × 160 independent phase shifters across an aperture of 3.1 mm × 3.2 mm. It has a measured beam divergence of 0.042°× 0.031°, a field of view (FOV) of 6.6°× 4.4°, and a response time of 5.7 μs. It is capable of providing about 25,600 rapidly steerable spots within its FOV. The grating phase shifters are optimized for the near-infrared telecom wavelength bands from 1200 to 1700 nm with 85% optical efficiency.

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Section: Resultsmentioning

confidence: 99%

2D broadband beamsteering with large-scale MEMS optical phased array

Wang

Zhou

Zhang

et al. 2019

Optica

141

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“…MMA devices developed at Fraunhofer IPMS have been successfully applied during the last decades in industrial photolithography tools, being fine-tuned to work in the ultraviolet spectral range. Nevertheless, further customizations of this MMA technology are possible in order to optimize the SLM characteristics for new emerging application fields, such as: laser beam steering [2], microscopy [3] and holography [4].…”

Section: Introductionmentioning

confidence: 99%

Towards a spatial light modulator technology for space applications: performance analysis under the environmental conditions

González

Berndt

Gallego

et al. 2023

International Conference on Space Optics — ICSO 2022

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Spatial Light Modulator (SLM) technologies are well established in many application fields over the last decades. Addressing challenging operational conditions, a special class of high-speed SLMs has emerged over the past 20 years, namely Micromirror Array (MMA) devices. Fraunhofer IPMS MMA technology has enabled several ultraviolet photolithography applications at industrial scale. Given the fact that these devices are available for scientific testing, we proposed to explore for the first time their functionality and performance with respect to the space application requirements for the European framework cooperation. Previous studies strongly support this approach with the investigation of several SLM technologies for space instrumentation.In this study, the key parameters of an already available 256 x 256 pixel MMA device have been assessed and its performance has been evaluated under environmental constraints of a future space mission, in terms of temperature (from -40 °C to 80 °C), vacuum (< 10 -5 mbar) and vibrations in X-, Y-and Z-axes, showing zero failure rate for the MMA device after all tests. These experimental findings, together with simulations results, confirm the robustness of the MMA technology, especially against temperature changes, and encourage further activities for the development of a spacecustomized spatial light modulator technology.

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MOEMS and MEMS ‐ Technology, Benefits & Uses

Grüger

2021

Portable Spectroscopy and Spectrometry

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Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology

Cited by 5 publications

References 3 publications

2D broadband beamsteering with large-scale MEMS optical phased array

2D broadband beamsteering with large-scale MEMS optical phased array

Towards a spatial light modulator technology for space applications: performance analysis under the environmental conditions

MOEMS and MEMS ‐ Technology, Benefits & Uses

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