Microelectronics: Design, Technology, and Packaging III 2007
DOI: 10.1117/12.759055
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Novel 3D modeling of In 0.53 Ga 0.47 As lateral PIN photodiode

Abstract: The lateral PIN photodiode (LPP) can be fabricated with ease using standard CMOS techniques such as diffusion or ion implantation to form the p+ and n+ wells in the absorbing layer. A novel diffusion-based three-dimensional LPP was modeled utilizing In 0.53 Ga 0.47 As as the absorbing layer. Interdigitated electrode structures were used to obtain responsivity of ~0.5-0.6 A/W and -3dB frequency of ~14-15 GHz at a wavelength of 1550 nm, bias voltage of 5V and optical power of 10 Wcm -2 . The modeled device is ab… Show more

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