Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Hsieh, Tsung‐Hsun; Jywe, Wen-Yuh; Chen, Shang Liang; Liu, Chien-Hung; Huang, Hsuan‐Jung

doi:10.1063/1.3585021

Cited by 5 publications

(4 citation statements)

References 20 publications

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“…However, with the feedback of calibration results, it was confirmed that the tolerance error of the "100% coincidence" measured by the commercial laser interferometer was about ±5 arcsec, which could result in poor measuring repeatability, especially for the case of long-range measurements, as shown in Figure 2a. Therefore, an altitude angle adjustment module composed of a beam splitter, a convex lens, and a QD was proposed based on the autocollimator principle [18] for obtaining higher calibration repeatability, as shown in Figure 2b and Figure 3. With the proposed module, the reflected beam was deflected by the beam splitter and passed through a convex lens onto QD, and the tolerance error of the "100% coincidence" could be reduced to ±1 arcsec.…”

Section: Pentaprism Modulementioning

confidence: 99%

A Geometric Error Measurement System for Linear Guideway Assembly and Calibration

et al. 2019

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Geometric errors, such as straightness, perpendicularity, and parallelism errors are determinant factors of both the accuracy and service life of a linear guideway. In this study, a multipurpose geometric error measurement system was mainly composed of a laser source and an in-lab-developed optical module is proposed. Two adjustment methods were used for the in-lab-developed optical module to calibrate the altitude angle of the pentaprism: The first one is designed for ease of operation based on Michelson principle using a laser interferometer as the light receiver, and the second is aimed at high calibration repeatability based on the autocollimator principle using the quadrant detector (QD) to replace the light receiver. The result shows that the residual errors of the horizontal straightness and the vertical straightness are within ±1.3 µm and ±5.3 µm, respectively, when referred to as the commercial laser interferometer. Additionally, the residual errors of perpendicularity and parallelism are within ±1.2 µm and ±0.1 µm, respectively, when referred to as the granite reference blocks

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Section: Pentaprism Modulementioning

confidence: 99%

A Geometric Error Measurement System for Linear Guideway Assembly and Calibration

et al. 2019

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“…They use a BS (beam splitter) to evenly distribute the light emitted by a single laser light source to two angle measuring probes. The measurement accuracy of roll, pitch and yaw angles is 0.04″ [11]. However, they only reduced the number of light sources, the two measuring probes are still arranged in the orthogonal direction.…”

Section: Introductionmentioning

confidence: 99%

3-DOF angle measurement method based on two interference images

Feng,

Lin,

2024

International Academic Conference on Optics and Photonics (IACOP 2023)

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With the development of observation satellite, precision lathe and lithography, the demand for high-precision threedegree of freedom(3-DOF) angle measurement instruments is becoming increasingly urgent. Laser measurement has the advantages of high accuracy, non-contact, and large measurement range and is widely used in this area. We established a 3-DOF angle measurement method using two lasers and set a new algorithm to decouple its mathematical model. We analyzed the factors that may affect the resolution of this method, and achieved the simultaneous measurement of pitch, yaw, and roll angles in theory. Our method has high resolution theoretically and does not have the problem of inconsistent coordinate references.

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“…Furthermore, such a goniometer occupies a large space and has a complex structure, thereby making its installation and adjustment difficult. Hsieh et al constructed an orthogonal dual autocollimation right-angle measurement system using a beam splitter and a single laser light source to measure roll, pitch, and yaw angles with an accuracy of up to 0.04 ′′ [10]. However, despite reducing the number of light sources, the probe still occupied a large space, and its working distance was short.…”

Section: Introductionmentioning

confidence: 99%

Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe

Yu,

Feng,

et al. 2023

Micromachines

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The development of high-precision satellites has increased the demand for ultraprecision three-degrees-of-freedom (3-DOF) angle measurements for detecting structural deformation. The required instrument should simultaneously measure pitch, yaw, and roll angles using a single reference point. This paper proposes a 3-DOF angle measurement method based on the wavefront interference principle, and a mathematical model and its decoupling algorithm were built. Then, an angle-sensing probe with an extremely simple structure was designed and constructed. Finally, a series of experiments were performed to verify the method’s feasibility. The experiment results showed that the roll, pitch, and yaw measurement resolution of the probe was better than 10, 1, and 1 μrad, respectively, providing a high-performance 3-DOF angle measurement with a single probe. The short-term stabilities of roll, pitch, and yaw were better than 22, 1.7, and 2.0 μrad, respectively.

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Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Cited by 5 publications

References 20 publications

A Geometric Error Measurement System for Linear Guideway Assembly and Calibration

A Geometric Error Measurement System for Linear Guideway Assembly and Calibration

3-DOF angle measurement method based on two interference images

Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe

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