Normally-Closed Electrostatic Microvalve Fabricated Using Exclusively Soft-Lithographic Techniques and Operated With Portable Electronics

Tice, Joshua D.; Rosheck, John; Hamlin, Christopher D.; Apblett, Christopher A.; Kenis, Paul J. A.

doi:10.1109/jmems.2013.2282711

Cited by 9 publications

(14 citation statements)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As the results demonstrate, capillary pressure changes due to electrowetting are an effective means for the generation of membrane movement in microdevices, even when electrowetting occurs on only one surface and not that containing the membrane. The displacements obtained (5–15 μm), like those found in a previous investigation of dual-active-surface devices [ 6 ], were significantly larger than those earlier achieved by electrostatic actuation using much higher voltage and power [ 4 ]. This paper’s single-active-surface results opens up a range of possible variations in actuator design.…”

Section: Discussionsupporting

confidence: 76%

“…To relieve the undesirable manufacturing, size, weight, and power characteristics of this approach, researchers have turned to alternative actuation technologies that permit on-chip, electronic control of LOC valves. By and large, the alternative technologies have fallen short, either requiring large voltage/power or yielding inadequate valve deflection (<5 μm) [ 2 , 3 , 4 , 5 ]. The authors have recently presented results showing that large deflections of a flexible membrane, like that appearing in LOC devices, can be achieved via a new actuation technique based upon actively controlling capillary pressure [ 6 ].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Actuation of Flexible Membranes via Capillary Force: Single-Active-Surface Experiments

Barth

Knospe

2018

Micromachines

View full text Add to dashboard Cite

Conventional approaches to microscale actuation, such as electrostatic, have difficulty in achieving large motion at moderate voltages. Recently, actuators relying on the active control of capillary pressure have been demonstrated, with the pressure change caused by electrowetting on a pair of opposing surfaces. In this work, experimental results are presented from five prototype devices in which only a single active surface is used. The results demonstrate that pressure changes induced in a liquid bridge in this manner can produce large deflections (15 μm) of a flexible membrane. Voltages employed in the tests were moderate (≤25 V). The influence of several design variables, such as membrane diameter and thickness, on the membrane deflection are examined. Theoretical predictions are also presented and generally follow the experimental values. Potential sources for the discrepancies between theory and experimental results are discussed. While deflections obtained using a single active surface are not as large as those obtained with two active surfaces, single-active-surface configurations offer a simple route to achieving adequate deflections for lab-on-a-chip microsystems.

show abstract

Section: Discussionsupporting

confidence: 76%

Section: Introductionmentioning

confidence: 99%

Actuation of Flexible Membranes via Capillary Force: Single-Active-Surface Experiments

Barth

Knospe

2018

Micromachines

View full text Add to dashboard Cite

show abstract

“…The buck regulator can achieve 75% efficiency for the High-Voltage TENG. In that situation, the power of the TENG can drive some small electronics 30 31 , which could be used widely for the remote and mobile environmental sensors, homeland security, and even wearable personal electronics 32 33 .…”

Section: Discussionmentioning

confidence: 99%

A Low Input Current and Wide Conversion Ratio Buck Regulator with 75% Efficiency for High-Voltage Triboelectric Nanogenerators

Luo

Bao

et al. 2016

Sci Rep

View full text Add to dashboard Cite

It is meaningful to research the Triboelectric Nanogenerators (TENG), which can create electricity anywhere and anytime. There are many researches on the structures and materials of TENG to explain the phenomenon that the maximum voltage is stable and the current is increasing. The output voltage of the TENG is high about 180–400 V, and the output current is small about 39 μA, which the electronic devices directly integration of TENG with Li-ion batteries will result in huge energy loss due to the ultrahigh TENG impedance. A novel interface circuit with the high-voltage buck regulator for TENG is introduced firstly in this paper. The interface circuit can transfer the output signal of the TENG into the signal fit to a lithium ion battery. Through the circuit of the buck regulator, the average output voltage is about 4.0 V and the average output current is about 1.12 mA. Further, the reliability and availability for the lithium ion battery and the circuit are discussed. The interface circuit is simulated using the Cadence software and verified through PCB experiment. The buck regulator can achieve 75% efficiency for the High-Voltage TENG. This will lead to a research hot and industrialization applications.

show abstract

“…Tice et al proposed an electrostatic microvalve based on elastomer. The microvalve could resist pressures up to 3 kPa with a voltage of 220 V. Replica molding, plasma bonding, and micro-transfer printing were used to manufacture this valve and it was integrated on a single chip [35]. Yoshida et al proposed an electrostatic microvalve based on a new pressure balance mechanism and the electrostatic actuator.…”

Section: Electrostatic Actuationmentioning

confidence: 99%

Actuation Mechanism of Microvalves: A Review

Qian

Hou

2020

Micromachines

View full text Add to dashboard Cite

The microvalve is one of the most important components in microfluidics. With decades of development, the microvalve has been widely used in many industries such as life science, chemical engineering, chip, and so forth. This paper presents a comprehensive review of the progress made over the past years about microvalves based on different actuation mechanisms. According to driving sources, plenty of actuation mechanisms are developed and adopted in microvalves, including electricity, magnetism, gas, material and creature, surface acoustic wave, and so on. Although there are currently a variety of microvalves, problems such as leakage, low precision, poor reliability, high energy consumption, and high cost still exist. Problems deserving to be further addressed are suggested, aimed at materials, fabrication methods, controlling performances, flow characteristics, and applications.

show abstract

Normally-Closed Electrostatic Microvalve Fabricated Using Exclusively Soft-Lithographic Techniques and Operated With Portable Electronics

Cited by 9 publications

References 23 publications

Actuation of Flexible Membranes via Capillary Force: Single-Active-Surface Experiments

Actuation of Flexible Membranes via Capillary Force: Single-Active-Surface Experiments

A Low Input Current and Wide Conversion Ratio Buck Regulator with 75% Efficiency for High-Voltage Triboelectric Nanogenerators

Actuation Mechanism of Microvalves: A Review

Contact Info

Product

Resources

About