2007
DOI: 10.1364/josaa.24.002880
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Normal vector method for convergence improvement using the RCWA for crossed gratings

Abstract: The rigorous coupled wave analysis (RCWA) is a widely used method for simulating diffraction from periodic structures. Since its recognized formulation by Moharam [J. Opt. Soc. Am. A12, 1068 and 1077 (1995)], there still has been a discussion about convergence problems. Those problems are more or less solved for the diffraction from line gratings, but there remain different concurrent proposals about the convergence improvement for crossed gratings. We propose to combine Popov and Nevière's formulation of the … Show more

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Cited by 140 publications
(99 citation statements)
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“…9 One of the simplest ways to calculate the scattering distribution in a periodic structure such as one comparable to Figure 1, is through the application of the rigorous coupled wave analysis (RCWA) proposed by Glytsis and Gaylord 10 and later optimized by many authors. 11,12 In this method, all the diffraction orders are characterized by a pair of forward and backward flux transfer coefficients, much like the classical Fresnel coefficients for reflection and transmission. This method is relatively uncomplicated, robust, can account for arbitrary grating geometries and is capable of providing exact solutions for specific shapes.…”
Section: Theoretical Analysismentioning
confidence: 99%
“…9 One of the simplest ways to calculate the scattering distribution in a periodic structure such as one comparable to Figure 1, is through the application of the rigorous coupled wave analysis (RCWA) proposed by Glytsis and Gaylord 10 and later optimized by many authors. 11,12 In this method, all the diffraction orders are characterized by a pair of forward and backward flux transfer coefficients, much like the classical Fresnel coefficients for reflection and transmission. This method is relatively uncomplicated, robust, can account for arbitrary grating geometries and is capable of providing exact solutions for specific shapes.…”
Section: Theoretical Analysismentioning
confidence: 99%
“…The offset of the computed solution with respect to the reference solution visible in Table 1 and the plateau on Figure 5 (error remains constant for N > 50) are due to staircasing. This effect is well known for the FMM [19] and can be reduced by a normal vector field approach [20].…”
Section: Numerical Resultsmentioning
confidence: 89%
“…In the case of DM, the implementation of the Fourier factorization rules [6] was obtained through the introduction of a normal-vector field inside the unit cells, such that the appropriate factorization rules could be applied to the normal and tangential field components separately. This same technique was then applied to the footprint of 2D-periodic gratings in RCWA [7] and made the staircase approximation in the periodic directions superfluous. Nevertheless, the staircase approximation in the aperiodic direction, which is inherent to RCWA, can still introduce scattering that is not present in the smooth structure that is approximated [6].…”
Section: Introductionmentioning
confidence: 99%