Layered nonstoichiometric vanadium oxides have aroused strong interest in energy conversion, storage, chemical catalysis, sensors, and optoelectronic devices. It is still a critical challenge to control unique atomiclayer constructions and oxygen-dependent multivalent states in layered metal oxides. Here, we demonstrate the layered nonstoichiometric V 7 O 16 thin films with controlled multivalent states and crystalline phases obtained by the combination of atomic layer deposition (ALD) and oxygen-dependent crystallization. The nonstoichiometric composition and crystalline microstructures are dominated by the oxidation states of vanadium and the thicknesses of the pristine films during the formation of layered V 7 O 16 thin films. Variable-temperature optical and electrical behaviors suggest that no abrupt electronic and structural transitions are observed in the layered V 7 O 16 thin films at a temperature ranging from 78 to 475 K. We expect that the oxygen-dependent multivalent states and crystalline phases in layered V 7 O 16 will provide more opportunities to fabricate layered oxides and electrochemical devices based on nonstoichiometric vanadium oxides.