“…To realize such large-area sample with high-resolution patterning, various recipes have been introduced, e.g. fs-laser machining for microscale punctured structures [64,241,242], focused ion beam [243,244], e-beam lithography [245,246], and photolithography techniques [125,247,248] for metamaterial structures and, finally, atomic layer deposition (ALD) for atomic-scale gap structures [75,193,249,250]. For nanoscale gap structures, photolithography can be considered as a promising fabrication method for mass production at the same time, as shown in Figure 16.…”