Nonradiative Recombination Centers Mapping of Oxygen Precipitates in p-type Si Using a Laser Heterodyne Photothermal Displacement Method

Harada, Tomoki; Iwakiri, Takahiro; Ohyama, Hiroki; Harada, Shogo; Ikari, Tetsuo; Fukuyama, Atsuhiko

doi:10.23919/moc58607.2023.10302932

2023 28th Microoptics Conference (MOC) 2023

DOI: 10.23919/moc58607.2023.10302932

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Nonradiative Recombination Centers Mapping of Oxygen Precipitates in p-type Si Using a Laser Heterodyne Photothermal Displacement Method

Tomoki Harada,

Takahiro Iwakiri,

Hiroki Ohyama

et al.

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Nonradiative Recombination Centers Mapping of Oxygen Precipitates in p-type Si Using a Laser Heterodyne Photothermal Displacement Method

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