Nonlocal conductivity effects in low-pressure cylindrical inductive discharges

Kolev, St; Shivarova, A.; Tarnev, Kh.

doi:10.1088/1742-6596/63/1/012020

Cited by 4 publications

(1 citation statement)

References 9 publications

(15 reference statements)

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“…33 In fact, Ref. 33 presents coupling of the 1D fluid-plasma model presented here to the theory of the nonlocal electrodynamics of inductive discharges with cylindrical coils developed before 34 within the kinetic plasma theory. The electrodynamical description 33,34 is based on a solution of the wave equation written for the azimuthal electric field of the transverse highfrequency wave sustaining the inductive discharges.…”

Section: A Changes In the Radial Structure Of Low-pressure Hydrogen mentioning

confidence: 99%

A small radius hydrogen discharge: An effective source of volume produced negative ions

Paunska

Shivarova

Tarnev

2010

Journal of Applied Physics

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Free-fall regime maintenance of hydrogen discharges is analyzed based on numerical solutions of a set of equations involving the balance equations of the charged particles [electrons, the three types of the positive ions (H+, H2+, and H3+), and negative H− ions] and of the neutral species (hydrogen atoms H and vibrationally excited molecules), the momentum equations of the positive ions, the electron energy balance equation, and the Poisson equation, all together 25 differential equations. The obtained results for varying discharge radius show strong accumulation of the negative ions in the on-axis region of the discharge when the discharge radius is small, which leads to a concept for a design of a volume-production based source as a matrix of small radius discharges. The variation in the negative ion density with changing gas pressure and electron density at the discharge axis is also analyzed.

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Section: A Changes In the Radial Structure Of Low-pressure Hydrogen mentioning

confidence: 99%

A small radius hydrogen discharge: An effective source of volume produced negative ions

Paunska

Shivarova

Tarnev

2010

Journal of Applied Physics

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Collisionless electron heating in periodic arrays of inductively coupled plasmas

Czarnetzki

Tarnev

2014

Physics of Plasmas

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A novel mechanism of collisionless heating in large planar arrays of small inductive coils operated at radio frequencies is presented. In contrast to the well-known case of non-local heating related to the transversal conductivity, when the electrons move perpendicular to the planar coil, we investigate the problem of electrons moving in a plane parallel to the coils. Two types of periodic structures are studied. Resonance velocities where heating is efficient are calculated analytically by solving the Vlasov equation. Certain scaling parameters are identified. The concept is further investigated by a single particle simulation based on the ergodic principle and combined with a Monte Carlo code allowing for collisions with Argon atoms. Resonances, energy exchange, and distribution functions are obtained. The analytical results are confirmed by the numerical simulation. Pressure and electric field dependences are studied. Stochastic heating is found to be most efficient when the electron mean free path exceeds the size of a single coil cell. Then the mean energy increases approximately exponentially with the electric field amplitude. V C 2014 AIP Publishing LLC. [http://dx.

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Characteristics of anomalous skin effect and evolution of power absorption regions in a cylindrical radio frequency inductively coupled plasma

2015

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In a low-pressure radio-frequency (13.56 MHz), inductively coupled argon plasma generated by a normal cylindrical rf coil, electric field, current density, and absorbed power density is calculated from magnetic field measured with a phase-resolved magnetic probe. The anomalous skin effect (ASE) for the cylindrical rf coil is compared to those previously reported for the planar and re-entrant cylindrical rf coils. Physical reasons for our observed characteristics of ASE are presented. With the increasing discharge power, the size and the number of negative and positive power absorption regions evolve into several distinct patterns. For the low discharge power (at 156.9 W), there is one area of positive and one area of negative power absorption in the radial direction. For the medium discharge power (279 W–683.5 W), there are two areas of negative and two areas of positive power absorption. For the even higher discharge power (above 803.5 W), the number of areas is the same as that of the medium discharge power, but the size of the inner positive and negative power absorption areas is approximately doubled and halved, respectively, while the outer positive and negative power absorption areas slightly shrinks. The evolution of positive and negative power absorption regions is explained as a result of electron thermal diffusion and the energy conversion between rf current and electric field. The spatial decays of electric field and current density are also elucidated by linking them with the positive and negative power absorption pattern.

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Nonlocal conductivity effects in low-pressure cylindrical inductive discharges

Cited by 4 publications

References 9 publications

A small radius hydrogen discharge: An effective source of volume produced negative ions

A small radius hydrogen discharge: An effective source of volume produced negative ions

Collisionless electron heating in periodic arrays of inductively coupled plasmas

Characteristics of anomalous skin effect and evolution of power absorption regions in a cylindrical radio frequency inductively coupled plasma

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