Nonlinear thermo-mechanical behaviour of MEMS resonators

Farokhi, Hamed; Ghayesh, Mergen H.

doi:10.1007/s00542-017-3381-1

Cited by 33 publications

(8 citation statements)

References 55 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…carbon nanotube, functionally graded materials, magnetorheological elastomers, macro fibre composite and ceramic matrix composite) [8~14], electro-mechanical equipment (e.g. microelectromechanical system oscillators and surface-mounted assembly isolators) [15,16] and actual facilities (e.g. flexible wicked heat pipes, largescale welded walls and sandwich microplates) [17~19].…”

Section: Tmcmentioning

confidence: 99%

Signal Separation of Phase-sensitive Optical Time-domain Reflectometry Considering Thermo-mechanical Coupling and 3D Data Matching

Wang¹,

Hu²,

Liu³

2019

View full text Add to dashboard Cite

This paper aims to enhance the signal separation accuracy of phase-sensitive optical timedomain reflectometry (Φ-OTDR) under thermo-mechanical coupling (TMC). For this purpose, the Φ-OTDR signal was firstly separated by genetic algorithm-empirical mode decompositionnonnegative matrix factorization (GA-EMD-NMF). Then, the Kalman-proportional-integralderivative (PID) method was introduced to further separate the data. Taking the TMC as the input, a feedback model was constructed by the genetic algorithm-radial basis function (GA-RBF) to decouple the TMC. To tackle the 3D Φ-OTDR data, a 3D speeded up robust features (SURF) method was developed to reconstruct the box filter and Gaussian pyramid based on the features of the 3D data, thereby enhancing the positioning accuracy of Φ-OTDR signal. Later, several experiments were carried out in a semi-anechoic room, which proved that the proposed method outperforms the traditional methods. The research findings shed new light on signal separation of Φ-OTDR.

show abstract

Section: Tmcmentioning

confidence: 99%

Signal Separation of Phase-sensitive Optical Time-domain Reflectometry Considering Thermo-mechanical Coupling and 3D Data Matching

Wang¹,

Hu²,

Liu³

2019

View full text Add to dashboard Cite

show abstract

“…As a result, modified theories for nanoscale structures are not the same as those of microscale structures [16–18]. Scale‐dependent elasticity theories such as the nonlocal are commonly used for nanostructures while the mechanics of micro‐structures is described via couple stress and strain gradient theories in the kinds of literature [19–23].…”

Section: Introductionmentioning

confidence: 99%

The Caputo‐Fabrizio heat transport law in vibration analysis of a microscale beam induced by laser

Sur

Mondal²

2020

Z Angew Math Mech

View full text Add to dashboard Cite

In the application of pulsed laser heating, such as laser hardening of metallic surfaces, conduction limited process is the dominant mechanism during the laser–workpiece interaction. As a consequence, time unsteady analysis of this problem becomes necessary. The present study examines the effect of ultra‐short‐pulsed laser heating in coupled thermoelastic vibration of a microscale beam resonator. The heat transport equation for the current problem is defined by incorporating the three‐phase‐lag heat transport law in the context of Caputo‐Fabrizio (CF) derivative. Finite sinusoidal Fourier and Laplace transform techniques have been employed to determine the lateral vibration of the beam and the temperature increment within the microscale beam. According to the graphical representations corresponding to the numerical results, conclusions about the new theory is constructed. Excellent predictive capability is demonstrated due to the presence of energy absorption depth and the order of CF derivative also.

show abstract

“…Krylov et al [14], using same technique, investigated the pull-in and snap-through instability of MEMS arches. Farokhi et al [15] constructed a high-dimensional reduced-order Galerkin model and then studied the effect of various system parameters on pull-in instabilities. Laura et al [16,17] explored the global dynamic behavior of MEMS arches.…”

Section: Introductionmentioning

confidence: 99%

Three-to-One Internal Resonance in MEMS Arch Resonators

Wang

Ren

2019

Sensors

View full text Add to dashboard Cite

We present an investigation of the nonlinear dynamics of a microelectromechanical system (MEMS) arch subjected to a combination of AC and DC loadings in the presence of three-to-one internal resonance. The axial force resulting from the residual stress or temperature variation is considered in the governing equation of motion. The method of multiple scales is used to solve the governing equation. A four first-order ordinary differential equation describing the modulation of the amplitudes and phase angles is obtained. The equilibrium solution and its stability of the modulation equations are determined. Moreover, we also obtain the reduced-order model (ROM) of the MEMS arch employing the Galerkin scheme. The dynamic response is presented in the form of time traces, Fourier spectrum, phase-plane portrait, and Poincare sections. The results show that when there is an internal resonance, the energy transfer occurs between the first and third modes. In addition, the response of the MEMS arch presents abundant dynamic behaviors, such as Hopf bifurcation and quasiperiodic motions.

show abstract

Nonlinear thermo-mechanical behaviour of MEMS resonators

Cited by 33 publications

References 55 publications

Signal Separation of Phase-sensitive Optical Time-domain Reflectometry Considering Thermo-mechanical Coupling and 3D Data Matching

Signal Separation of Phase-sensitive Optical Time-domain Reflectometry Considering Thermo-mechanical Coupling and 3D Data Matching

The Caputo‐Fabrizio heat transport law in vibration analysis of a microscale beam induced by laser

Three-to-One Internal Resonance in MEMS Arch Resonators

Contact Info

Product

Resources

About