Nonlinear silicon photonics on CMOS-compatible tellurium oxide

Abstract

Silicon photonics is coming of age; however, it is still lacking a monolithic platform for optical sources and nonlinear functionalities prompting heterogeneous integration of different materials tailored to different applications. Here we demonstrate tellurium oxide as a complementary metal oxide semiconductor silicon photonics platform for nonlinear functionalities, which is already becoming an established platform for sources and amplifiers. We show broadband supercontinuum generation covering the entire telecom window and show for the first time to our knowledge third-harmonic generation in its integrated embodiment. Together with the nowavailable lasers and amplifiers on integrated TeO 2 this work paves the way for a monolithic TeO 2-based nonlinear silicon photonics platform.

Effect of high-temperature remelting on the properties of Sn-doped β-Ga2O3 crystal grown using the EFG method

“…The blue emission is ascribed to the recombination of an electron and a hole trapped in a gallium ion vacancy. [47][48][49] The blue emission peak intensity of the blue area (Fig. 6(a)) is mildly higher This journal is © The Royal Society of Chemistry 2023 than that of the colorless area (Fig.…”

“…A similar phenomenon also occurred in β-Ga 2 O 3 thin films, which was attributed to various defect concentrations caused by crystallization and oxygen vacancies. 48,49 The defects from the oxygen vacancies may reduce the luminescence efficiency of the β-Ga 2 O 3 . 43 Therefore, the defects in the blue area are fewer than those in the colorless area.…”

Supercontinuum in integrated photonics: generation, applications, challenges, and perspectives

“…An SCG generated in TeO 2 was presented in [ 154 ]. The interest in exploiting the nonlinearity of TeO 2 , with a relatively high nonlinear refractive index estimated close to 40 times that of silica, is in the possibility to combine these functionalities with active properties.…”

“…However, difficulties in the fabrication of integrated structures with low loss and high confinement have limited the potential of the platform for nonlinear optics. In [ 154 ], TeO 2 is used as a thin 370 nm layer on top of a SiN waveguide core. It is estimated that 70% of the total mode energy is confined in the TeO 2 .…”

Observation and enhancement of stimulated Brillouin scattering in tellurite covered silicon nitride waveguides

“…A promising material for on-chip SBS is tellurite, or tellurium oxide (TeO 2 ), which has shown to be a good opto-acoustic material [6]. Low loss circuits can be made with tellurite covered silicon nitride waveguides, showing losses down to 0.25 dB/cm [7]. These waveguides can be used for supercontinuum generation [7], and can also be doped for use as on-chip amplifiers [8].…”