“…The values of the line resistance R s and R g , including the skin effect, can be easily deduced from the conductivity % Al of the Al metallization and the line dimensions R s = % Al 1 l w 1 t 1 + f f0 (10) with f 0 as the skin-effect corner frequency, which can be determined from the extracted series resistance. R p of the MSL that corresponds to the substrate resistance, which can be calculated from the measurable sheet resistance of the substrate, including the channel stopper, is here, approximately % Sub =d 300 = by Rp = % Sub d 1 s l : (11) The extracted values of L s and C c remain nearly constant over the whole frequency range and the value of Rp for the small CPW is, in fact, nearly zero. For the MSL, the extracted values of C p and R p decrease with higher frequencies, which is comparable to the results of [8].…”