Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash
Shuo Kang,
Buyang Zhang,
Xing Huang
et al.
Abstract:A macro–micro dual-drive motion platform is a class of key system utilized in ultra-precision instruments and equipment for realizing ultra-high-precision positioning, which relates to the fields of semiconductor manufacturing, ultra-precision testing and machining, etc. Aiming at the ultra-high-precision positioning control problem of macro–micro dual-drive systems containing mechanical backlash, this paper analyzes the combined effect of mechanical coupling and backlash, and proposes a macro–micro compound c… Show more
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