Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements

Dai, Jiacheng; Zeng, Wenhan; Zhong, Wenbin; Jiang, Xiangqian (Jane); Lu, Wenlong

doi:10.1016/j.measurement.2023.114091

Measurement

2024

DOI: 10.1016/j.measurement.2023.114091

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Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements

Jiacheng Dai,

Wenhan Zeng,

Wenbin Zhong

et al.

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Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements

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References 19 publications

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