Nonlinear behaviour of electrically actuated MEMS resonators

Ghayesh, Mergen H.; Farokhi, Hamed; Amabili, Marco

doi:10.1016/j.ijengsci.2013.05.006

Cited by 253 publications

(83 citation statements)

References 27 publications

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“…Clamped-clamped microbeams are used numerously in MEMS as solo components in devices or as spring components to support and add stiffness to other microstructures [1][2][3][4][5]. They are commonly fabricated with unavoidable initial curvature due to stress gradients and other imperfections.…”

Section: Introductionmentioning

confidence: 99%

Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections

Bataineh

Younis

2014

Microsyst Technol

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We present an investigation into the static and dynamic behavior of an electrostatically actuated clamped-clamped polysilicon microbeam resonator accounting for its fabrication imperfections, which are commonly encountered in similar microstructures. These are mainly because of the initial deformation of the beam due to stress gradient and its flexible anchors. First, we show experimental data of the microbeam when driven electrically by varying the amplitude and frequency of the voltage loads. The results reveal several interesting nonlinear phenomena of jumps, hysteresis, and softening behaviors. Theoretical investigation is then conducted to model the microbeam, and hence, interpret the experimental data. We solve the Eigen value problem governing the natural frequencies analytically. We then utilize a Galerkin-based procedure to derive a reduced order model, which is then used to simulate both the static and dynamic responses. To achieve good matching between theory and experiment, we show that the exact profile of the deformed beam needs to be utilized in the reduced order model, as measured from the optical profiler, combined with a shooting technique simulation, which is capable of tracing the resonant frequency branches under very-low damping conditions.

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Section: Introductionmentioning

confidence: 99%

Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections

Bataineh

Younis

2014

Microsyst Technol

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“…They reported that softening behavior was due to electrical actuation, and hardening behavior was due to the stretching of the neutral axes of CNT. Ghayesh et al [19] also used ROM to examine the nonlinear behavior of MEM cantilever under AC and DC actuation. The system reported a hardening effect for the frequency response in the cases of primary resonance and superharmonic resonance.…”

Section: Introductionmentioning

confidence: 99%

Bifurcation and pull-in voltages of primary resonance of electrostatically actuated SWCNT cantilevers to include van der Waals effect

Caruntu

Luo

2016

Meccanica

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In this work the voltage response of primary resonance of electrostatically actuated single wall carbon nano tubes (SWCNT) cantilevers over a parallel ground plate is investigated. Three forces act on the SWCNT cantilever, namely electrostatic, van der Waals and damping. While the damping is linear, the electrostatic and van der Waals forces are nonlinear. Moreover, the electrostatic force is also parametric since it is given by AC voltage. Under these forces the dynamics of the SWCNT is nonlinear parametric. The van der Waals force is significant for values less than 50 nm of the gap between the SWCNT and the ground substrate. Reduced order model method (ROM) is used to investigate the system under soft excitation and weak nonlinearities. The voltageamplitude response and influences of parameters are reported for primary resonance (AC near half natural frequency).

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“…Among them, microbeams are present, for example in microactuators, biosensors, microswitches, and electrostatically excited microactuators (Azizi et al 2013;Krylov et al 2011;Li et al 2008;Yu et al 2012;Ghayesh et al 2013c;Farokhi and Ghayesh 2015b;Ghayesh and Farokhi 2015;Gholipour et al 2014;Farokhi and Ghayesh 2015a). The experimental investigations discovered that microbeams display size-dependent deformation behaviour; classical continuum theories cannot predict this behaviour.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear resonant response of imperfect extensible Timoshenko microbeams

Farokhi

Ghayesh

2015

Int J Mech Mater Des

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This paper investigates the nonlinear sizedependent dynamics of an imperfect Timoshenko microbeam, taking into account extensibility. Based on the modified couple stress theory, the nonlinear equations of motion for the longitudinal, transverse, and rotational motions are derived via Hamilton's energy method. A high-dimensional finite degree-offreedom system of ordinary differential equations is obtained by the application of the Galerkin scheme. This set of equations is solved through use of the pseudo-arclength continuation method. A stability analysis is conducted via use of the Floquet theory. The resonant motion characteristics of the microbeam are examined by plotting the frequency-response and force-response curves. The effect of system parameters on the resonant response of the system is highlighted.

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Nonlinear behaviour of electrically actuated MEMS resonators

Cited by 253 publications

References 27 publications

Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections

Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections

Bifurcation and pull-in voltages of primary resonance of electrostatically actuated SWCNT cantilevers to include van der Waals effect

Nonlinear resonant response of imperfect extensible Timoshenko microbeams

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