Nonlinear Analytical Model of Two Weakly Coupled MEMS Cantilevers for Mass Sensing Using Electrostatic Actuation

Rabenimanana, Toky Harrison; Walter, Vincent; Kacem, Najib; Moal, Patrice Le; Lardiès, Joseph

doi:10.3390/proceedings2131084

Cited by 4 publications

(3 citation statements)

References 6 publications

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“…Penelitian untuk meningkatkan performa akselerometer melalui investigasi mekanisme penginderaan baru juga telah dilakukan melalui pendekatan peningkatan berbasis osilator yang disinkronkan untuk meningkatkan resolusi sebanyak 5x lipat dari akselerometer resonansi mikroelektromekanis [9]. Resonator MEMS juga diaplikasikan untuk penginderaan massa contohnya dengan menggunakan struktur mikrokantilever yang digerakkan secara piezoelektrik [10,11], struktur kopel kantilevel yang diaktuasi secara elektrostatik [12], struktur jepit tunggal (single-clamped) [13], dan struktur jepit dobel (clamped-clamped) [14]. Pada penelitian ini, resonator MEMS akan didesain untuk penginderaan massa dengan menggunakan struktur free-free beam.…”

Section: Pendahuluanunclassified

Desain sensor massa resonator MEMS menggunakan struktur free-free beam

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2021

Angkasa

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MEMS (micro-electromechanical systems) is an integrated electro-mechanical device which the technology has been applied to various applications, one of which is for the fabrication of microsensors, such accelerometers, microsensors for flow sensing, pressure sensing and mass sensing. In the MEMS implementation, there are several approaches and structures that can be used. This study designed a MEMS resonator mass sensor by the means of a mechanical resonator approach with free-free beam structure and actuated electrostatically. The design is expected to produce a MEMS based mass sensor with a high performance.

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Section: Pendahuluanunclassified

Desain sensor massa resonator MEMS menggunakan struktur free-free beam

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2021

Angkasa

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“…However, in circuits in which the nonlinearities are not closely connected, the procedure fails. This is the case of circuits containing two nonlinear resonators, which have recently attracted interest for a variety of applications, including nonlinear isolators [19], [20], [21], [22], [23], robust wireless power transfer [24], [25], and sensors [26], [27], [28], [29], [30], [31]. The multivalued solution may originate in either one or another resonator or be the result of the combined action of both.…”

Section: Introductionmentioning

confidence: 99%

Generalized Analysis of Systems Based on Two Nonlinear Resonators

Suárez,

Ramírez

2024

IEEE Trans. Microwave Theory Techn.

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Circuits containing two nonlinear resonators have been recently proposed for a variety of applications, such as nonlinear isolators, robust wireless power transfer, and sensors. However, their simulation is difficult due to the presence of hysteresis phenomena, associated with turning points in the solution curve, and even disconnected curves, as will be shown in this work. Here, we will present a general analysis methodology, compatible with commercial harmonic balance (HB) and able to provide all the coexisting periodic solutions. It is based on the use of two auxiliary generators (AGs), one per nonlinear resonator. The first AG acts like an independent source and controls the second one, which also depends on the input source, unlike a previously presented formulation. This extra dependence enables a systematic and broad-scope application but demands a conceptually different analysis strategy, presented in this work. Besides its numerical capabilities (in combination with HB), the new formulation will provide insight into the complex behavior of systems composed by two nonlinear resonators. It will be illustrated through its application to a Lorentzian-Fano nonlinear isolator and a system for robust near-field wireless power transfer, in which the new formulation particularizes to the previous one.

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“…Tuning the DC voltage to counterbalance defects can be realized with two resonators with the same dimensions, but using initial asymmetric device allows us to know which one is the stiffest and needs electrostatic softening. This principle was already investigated in [25] and an analytical model using the Euler-Bernoulli beam theory was briefly exposed in [26]. In this paper, we will detail this model in order to design the device.…”

Section: Introductionmentioning

confidence: 99%

Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation

Rabenimanana

Walter

Kacem

et al. 2019

Sensors and Actuators A: Physical

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This paper presents a sensor using the mode localization phenomenon to detect a mass perturbation. It is composed of two cantilevers with different lengths and connected by a coupling beam. The short cantilever is electrostatically actuated and by changing the applied DC voltage, we can reduce its stiffness and reach the veering point, which corresponds to a balanced system. This principle allows us to overcome the manufacturing defect which perturbs the initial system. An analytical model using the Euler-Bernoulli beam theory is developed for the design. The equation of the continuous system is discretized with the Galerkin method and simulations are performed. The designed device composed of polysilicon coupled microbeams is then fabricated with the MultiUser MEMS Processes and an experimental investigation is carried out. Three devices with different coupling are considered with a length ratio of 0.98. This ratio is suitable to reach the veering point by using a DC balancing voltage around the half of the pull-in voltage. The comparison between theoretical and experimental results shows a good agreement for each device.

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Nonlinear Analytical Model of Two Weakly Coupled MEMS Cantilevers for Mass Sensing Using Electrostatic Actuation

Cited by 4 publications

References 6 publications

Desain sensor massa resonator MEMS menggunakan struktur free-free beam

Desain sensor massa resonator MEMS menggunakan struktur free-free beam

Generalized Analysis of Systems Based on Two Nonlinear Resonators

Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation

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