Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films

Hoogeboom-Pot, Kathleen; Turgut, Emrah; Hernández-Charpak, Jorge N.; Shaw, Justin M.; Kapteyn, Henry C.; Murnane, Margaret M.; Nardi, Damiano

doi:10.1021/acs.nanolett.6b00606

Cited by 28 publications

(29 citation statements)

References 34 publications

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“…if Qint>>Qenv). Here, the proximity between the quality factors measured for mode 1 (Q1=18±5) and the computed one (17) indicates that this is the case for this mode, a conclusion also supported by our previous estimation of Qint ≈70 for mode 1 in the context of investigations limited to circular NDs. 44 Conversely, the measurements yield Q2=16±3 quality factors for mode 2, considerably smaller than those obtained in simulations (Q2>1000 for Deq/h=4).…”

Section: Acoustic Fem Simulations Based On the Structural Mechanics Msupporting

confidence: 88%

“…[8][9][10][11][12][13] Ultrafast optical methods have recently emerged as competitive techniques for devices nanometrological inspection. 14,15 Nevertheless, the focus has mainly been on retrieving the thermal and mechanical properties of metallic nanometric sized films, [16][17][18] overlayers 19 and periodic nanostructures. 20,21 In this context, the development of optical spectroscopy approaches capable to investigate the plasmonic and vibrational responses of individual metal nano-objects has been a major breakthrough, as they avoid spurious averaging and inhomogeneous broadening effects resulting from dispersions of nano-object morphology, environment and orientation in ensemble of nanostructures.…”

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confidence: 99%

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Signatures of Small Morphological Anisotropies in the Plasmonic and Vibrational Responses of Individual Nano-objects

Medeghini

Rouxel

Crut

et al. 2019

J. Phys. Chem. Lett.

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The plasmonic and vibrational properties of single gold nanodisks patterned on a sapphire substrate are investigated via spatial modulation and pump-probe optical spectroscopies. The features of the measured extinction spectra and time-resolved signals are highly sensitive to minute deviations of the nanodisk morphology from a perfectly cylindrical one. An elliptical nanodisk section, as compared to a circular one, lifts the degeneracy of the two nanodisk in-plane dipolar surface plasmon resonances, which can be selectively excited by controlling the polarization of the incident light. This splitting effect, whose amplitude increases with nanodisk ellipticity, correlates with the detection of additional vibrational modes in the context of time-resolved spectroscopy. Analysis of the measurements is performed through the combination of optical and acoustic numerical models. This allows us first to estimate the dimensions of the investigated nanodisks from their plasmonic response, and then to compare the measured and computed frequencies of their detectable vibrational modes, which are found in excellent agreement. This study demonstrates that single-particle optical spectroscopies are able to provide access to fine morphological characteristics, representing in this case a valuable alternative to traditional techniques aimed at post-fabrication inspection of subwavelength nanodevice morphology.

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Section: Acoustic Fem Simulations Based On the Structural Mechanics Msupporting

confidence: 88%

mentioning

confidence: 99%

Signatures of Small Morphological Anisotropies in the Plasmonic and Vibrational Responses of Individual Nano-objects

Medeghini

Rouxel

Crut

et al. 2019

J. Phys. Chem. Lett.

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“…(In past work, these acoustic waves were used to characterize the elastic properties of ultrathin films [23,24].) After expanding, the Ni nanolines relax back to their unperturbed surface profile, as heat is transferred into the substrate on few nanoseconds time scales.…”

Section: Experimental Methodsmentioning

confidence: 99%

Engineering Nanoscale Thermal Transport: Size- and Spacing-Dependent Cooling of Nanostructures

et al. 2019

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Nanoscale thermal transport is becoming ever more technologically important with the development of next-generation nanoelectronics, nanomediated thermal therapies, and high efficiency thermoelectric devices. However, direct experimental measurements of nondiffusive heat flow in nanoscale systems are challenging, and first-principle models of real geometries are not yet computationally feasible. In recent work, we used ultrafast pulses of short-wavelength light to uncover a previously-unobserved regime of nanoscale thermal transport that occurs when the width and separation of heat sources are comparable to the mean free paths of the dominant heat-carrying phonons in the substrate. We now systematically compare thermal transport from gratings of metallic nanolines with different periodicities, on both silicon and fused-silica substrates, to map the entire nanoscale thermal transport landscape -from closely spaced through increasingly isolated to fully isolated heat-transfer regimes. By monitoring the surface profile dynamics with subangstrom sensitivity, we directly measure thermal transport from the nanolines into the substrate. This allows us to quantify for the first time how the nanoline separation significantly impacts thermal transport into the substrate, making it possible to reach efficiencies that are within a factor of 2 of the diffusive (i.e., thin-film) limit. We also show that partially isolated nanolines perform significantly worse, because cooling occurs in a regime that is intermediate between close-packed and fully isolated heat sources. This work thus confirms the surprising prediction that closely spaced nanoscale heat sources can cool more quickly than when far apart. These results show that our predictive model is validated by experiment over a broad parameter space, which is important for benchmarking theories that go beyond the Fourier model of heat diffusion, and for informed design of nanoengineered systems.

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“…Some interesting characteristics, such as elastic constants and adhesion properties, can be determined using time‐resolved opto‐acoustic nanometrology . This technique constitutes an interesting prospective, as it can provide mechanical properties with great precision based on photoacoustic excitation of the breathing modes of the films, and their detection, via the acousto‐optic effect.…”

Section: Resultsmentioning

confidence: 99%

Mechanical Behavior and Adhesion of the Ti/Cr/Au Metallization Scheme on Diamond Substrate

2017

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The mechanical properties of a Ti/Cr/Au metallization system deposited on a heavily doped diamond substrate are evaluated, first using nano‐indentation tests. Various kinds of conditions are adopted, such as small and high force loadings. These tests are completed by in situ scanning electron microscopy observations of the surface. The adhesion of such multilayer on the diamond substrate is assessed using nano‐scratching tests. The profiles of the obtained scratches are analyzed to detect any singularities or defects. Finally, a cross‐section topography is performed, in order to obtain the cross profile of the scratch, and to determine the scratch hardness parameter of the metallization system. The Ti/Cr/Au metallization system is a potential candidate to play the role of ohmic contact on diamond. Therefore, its adhesion to diamond is important, since the whole power electronic assembly is mainly subjected to thermal cycling during service. The metallization system must adhere well to diamond, so as to resist temperature gradients and thermal strains that are widely observed in extreme thermal conditions. Otherwise, debonding phenomena may occur, and the whole electronic packaging fail.

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Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films

Cited by 28 publications

References 34 publications

Signatures of Small Morphological Anisotropies in the Plasmonic and Vibrational Responses of Individual Nano-objects

Signatures of Small Morphological Anisotropies in the Plasmonic and Vibrational Responses of Individual Nano-objects

Engineering Nanoscale Thermal Transport: Size- and Spacing-Dependent Cooling of Nanostructures

Mechanical Behavior and Adhesion of the Ti/Cr/Au Metallization Scheme on Diamond Substrate

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