Abstract:A new method for nondestructive testing of SiO2 film thickness using a portable one-port surface acoustic wave (SAW) resonator based on lithium niobate (LiNbO3) is proposed. First, the finite element method is used to simulate and analyze the relationship between the resonant frequency of SAW resonator and film thickness. Then, the vector network analyzer is used to nondestructively characterize the thickness of SiO2 film by SAW resonator. The relationship between the thickness and the corresponding resonant f… Show more
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