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2015
DOI: 10.1109/tim.2015.2406053
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Noncontact Thickness Measurement of Metal Films Using Eddy-Current Sensors Immune to Distance Variation

Abstract: A simple method for measuring the thickness of metal films based on eddy-current sensors (ECSs) immune to distance variation is proposed. The slope of the lift-off curve (LOC) in the RL impedance plane is a good feature for characterizing target thickness independent of lift-off distance variation. A simple equivalent model was built to deal with the ECS problem, and the essential relationship between the slope of LOC (SLOC) and target properties was obtained. Full finite element analysis was conducted to anal… Show more

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Cited by 107 publications
(20 citation statements)
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“…The inductance of the sensor coil decreases due to the reduction in magnetic flux in the coil. Additionally, the resistance of the sensor coil increases because of the energy dissipation caused by the PEC [34]. This was verified by experiments and analyses in the study.…”
Section: Resultssupporting
confidence: 72%
“…The inductance of the sensor coil decreases due to the reduction in magnetic flux in the coil. Additionally, the resistance of the sensor coil increases because of the energy dissipation caused by the PEC [34]. This was verified by experiments and analyses in the study.…”
Section: Resultssupporting
confidence: 72%
“…Based on the equivalent circuit of the transformer, the CFRP sample in this study was modeled with self‐inductance and electrical resistance, denoted by Leddy and Reddy, respectively (Figure 2C). 31–33 …”
Section: Methodsmentioning
confidence: 99%
“…Based on the equivalent circuit of the transformer, the CFRP sample in this study was modeled with self-inductance and electrical resistance, denoted by L eddy and R eddy , respectively (Figure 2C). [31][32][33] As discussed earlier, eddy current loss was used to characterize the active power loss, also referred to as Joule heat, caused by the flow of eddy current in the CFRP. The power losses caused by the eddy currents on L eddy and R eddy were reactive and active power losses, respectively.…”
Section: Measurement Of Eddy Current Loss Using the New Probementioning
confidence: 99%
“…According to Lentz’s rule, the secondary magnetic field is directed opposite to the primary field and thus causes a change in the impedance of the coil. This property makes it possible to detect defects in conductive objects [ 13 , 14 , 15 , 16 , 17 , 18 , 19 ] and determine their geometric dimensions [ 20 , 21 , 22 , 23 , 24 , 25 ], magnetic permeability [ 26 , 27 , 28 ], or electrical conductivity [ 29 , 30 , 31 ]. The changes in the impedance components of the sensor, and therefore the sensitivity of the measurement, strongly depends on the frequency of the current that excites the eddy currents and on the geometry of the sensor.…”
Section: Introductionmentioning
confidence: 99%