1997
DOI: 10.1063/1.119456
|View full text |Cite
|
Sign up to set email alerts
|

Noncontact semiconductor wafer characterization with the terahertz Hall effect

Abstract: We demonstrate noncontact measurements of the Hall mobility of doped semiconductor wafers with roughly 250 μm spatial resolution, using polarization rotation of focused beams of terahertz (THz) radiation in the presence of a static magnetic field. Quantitative and independent images of both carrier density and mobility of a doped semiconductor wafer have been obtained.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
84
0

Year Published

2002
2002
2021
2021

Publication Types

Select...
7
3

Relationship

0
10

Authors

Journals

citations
Cited by 165 publications
(84 citation statements)
references
References 16 publications
0
84
0
Order By: Relevance
“…Specifically, the ability to perform imaging in the THz would have profound impact on the areas of security [1,2,3,4], biology [5,6], and chemistry [7,8]. However, imaging in the terahertz is complicated by the a lack of easily accessible electromagnetic responses from naturally occurring materials.…”
Section: Introductionmentioning
confidence: 99%
“…Specifically, the ability to perform imaging in the THz would have profound impact on the areas of security [1,2,3,4], biology [5,6], and chemistry [7,8]. However, imaging in the terahertz is complicated by the a lack of easily accessible electromagnetic responses from naturally occurring materials.…”
Section: Introductionmentioning
confidence: 99%
“…An essential experimental ingredient that enables the measurement is a recent development in terahertz time-domain spectroscopy (THz-TDS) [19][20][21]. By combining the polarization spectroscopy with THz-TDS, the magneto-optical Faraday effect and Kerr effect have become measurable in high-T c superconductors [22] and in doped semiconductors [23,24]. Since these magnetooptical effects are high frequency counterparts to the dc Hall effect, we are now plunging into the "optical Hall conductivity" as a novel probe.…”
mentioning
confidence: 99%
“…6 It is natural to suggest that a similar technique can be used to perform magneto-transport measurements in the THz spectral range with subpicosecond temporal resolution. 7 Although research areas as spintronics and femtosecond magnetism would greatly profit from THz magneto-optics, its feasibility is still questionable and studies of magnetooptical phenomena in this spectral range are still scarce. To date, THz magneto-optical phenomena have been mostly studied either in conducting materials without magnetic order or in magnetically ordered non-conducting materials.…”
mentioning
confidence: 99%