Nonaqueous Atomic Layer Deposition of Aluminum Phosphate

Knohl, Stefan; Roy, Amit; Lungwitz, Ralf; Spange, Stefan; Mader, Thomas F.; Nestler, Daisy; Wielage, B.; Schulze, Steffen; Hietschold, Michael; Wulff, H.; Helm, Christiane A.; Seidel, Falko; Zahn, Dietrich R. T.; Goedel, Werner A.

doi:10.1021/am401092z

Cited by 24 publications

(25 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…1 This comes at the expense of very slow growth (typically in the order of 1 Å /cycle), making ALD most suitable for very thin films. Although many different ALD processes have been developed for various classes of materials such as oxides, ii-vi and iii-v semiconductors, metal nitrides, metals, metal sulfides, and fluorides, 2 the existing reports on ALD of phosphates are still limited, [3][4][5][6][7][8][9][10][11][12][13] but have recently been increasing in number because of their relevance as electrode [14][15][16][17][18] or electrolyte [19][20][21][22] films in lithium-ion batteries.…”

Section: Introductionmentioning

confidence: 99%

Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

Dobbelaere

Mattelaer

Vereecken

et al. 2017

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

View full text Add to dashboard Cite

Vanadium phosphate films were deposited by a new process consisting of sequential exposures to trimethyl phosphate (TMP) plasma, O 2 plasma, and either vanadium oxytriisopropoxide [VTIP, OV(O-i-Pr) 3 ] or tetrakisethylmethylamido vanadium [TEMAV, V(NEtMe) 4 ] as the vanadium precursor. At a substrate temperature of 300 C, the decomposition behavior of these precursors could not be neglected; while VTIP decomposed and thus yielded a plasma-enhanced chemical vapor deposition process, the author found that the decomposition of the TEMAV precursor was inhibited by the preceding TMP plasma/O 2 plasma exposures. The TEMAV process showed linear growth, saturating behavior, and yielded uniform and smooth films; as such, it was regarded as a plasma-enhanced atomic layer deposition process. The resulting films had an elastic recoil detection-measured stoichiometry of V 1.1 PO 4.3 with 3% hydrogen and no detectable carbon contamination. They could be electrochemically lithiated and showed desirable properties as lithiumion battery electrodes in the potential region between 1.4 and 3.6 V versus Li þ /Li, including low capacity fading and an excellent rate capability. In a wider potential region, they showed a remarkably high capacity (equivalent to three lithium ions per vanadium atom), at the expense of reduced cyclability. V

show abstract

Section: Introductionmentioning

confidence: 99%

Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

Dobbelaere

Mattelaer

Vereecken

et al. 2017

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

View full text Add to dashboard Cite

show abstract

“…FePO 4 combined with carbon nanotubes also owns well capacity . Figure b shows charge–discharge profiles of carbon nanotube‐amorphous FePO 4 core–shell nanowires prepared by Kim et al The first 5 cycles of prepared electrode are at a current rate of 20 mA g −1 . It shows that as a function of state of charge/discharge, the potential in amorphous FePO 4 has smooth and steady increases.…”

Section: Lithium Batterymentioning

confidence: 94%

Synthesis of Iron Phosphate and Their Composites for Lithium/Sodium Ion Batteries

Shao

Wei

et al. 2018

Advanced Sustainable Systems

View full text Add to dashboard Cite

As the energy crisis turning out to be more and more serious, an interest in renewable energy sources is also increasing. [3] Researchers around the world have been devoting themselves to developing a high-performance electric energy storage material [4] to meet the demand for ecofriendly, sustainable, and low-cost energy. Among several kinds of electrical energy storage systems, lithiumion batteries have been developed as largescale energy storage units [5] and energy storage medium in electric vehicles, [6] smart grids, and other clean energy systems such as solar and wind since 1990s. [7] The lithium ion battery is identified as one of the ideal candidates to meet these requirements due to its desired energy density, superior voltage, and light weight. [8] However, extensive application of lithium ion batteries faces challenges related to the availability and cost of lithium. Scientists have their eyes on making sodium ion batteries as an alternative, because sodium is more abundant than lithium. Except that, it is also cheaper and easy to recover. [9] So nowadays, studying new kinds of electrode materials for lithium ion batteries and sodium ion batteries can be a rewarding work.During the last few decades, LiFePO 4 has attracted much attention, which was reported as a positive electrode for rechargeable lithium ion batteries first by Good-enough and co-workers in 1990s. [10] Nowadays, thousands of research publications have been authored on LiFePO 4 , [11] such as graphene-encapsulated LiFePO 4 composite, [12] pure LiFePO 4 , and LiFePO 4 /C, [13] 3D porous LiFePO 4 , [14] olivine LiFePO 4 , [15] mesoporous carboncoated LiFePO 4 , [16] graphene-modified LiFePO 4 , [17] LiFePO 4 / reduced graphene oxide hybrid, [18] and so on. LiFePO 4 owns favorable kinetics of the lithium intercalation/deintercalation process [19,20] and its nanocrystal size and shape can be easily controlled, [21] especially when it is complexed with carbon-based materials or other elements, the electrochemical properties of the composite material can be greatly improved. [22,23] It also has advantages of atop safety, environmental friendliness, affordability, as well as its comparatively reasonable electrochemical performance. [24][25][26][27] Until now, many researchers have examined LiFePO 4 as next generation cathode material. [28] Since FePO 4 also shows intrinsically poor ionic and electrical conductivity, small tap density which influences its electrochemical performance, [29] LiFePO 4 will not be further discussed in this article.High-performance electric energy storage material has recently developed due to the attention for sustainable development. As ecofriendly energy storage device, lithium ion batteries and sodium ion batteries deserve more concern today. FePO 4 and NaFePO 4 share similar advantages such as easy preparation, abundant, and inexpensive, so they can be ideal materials for lithium/sodium ion batteries. This review is focused on recent progresses in nanostructured FePO 4 /NaFePO 4 -based nanomaterial as cathode ma...

show abstract

“…These platelets might comprise sliding planes for internal shearing. Furthermore, the diffusion coefficient of oxygen within AlPO 4 is very low, rendering it suitable as an oxidation barrier coating, for example, for carbon fibres . It is especially promising that alumina fibres, coated with 1 µm thin layers of aluminium phosphate via a wet chemical process and subsequently embedded within an alumina matrix, show a significant fibre pull‐out, even after being sintered at 1300 °C, or hot‐pressed at a temperature of 1250 °C …”

Section: Introductionmentioning

confidence: 99%

“…Usually, aluminium phosphate coatings are prepared using wet processes such as the sol‐gel process, often involving several cycles of deposition until the desired coating thickness is reached . Layers of mixed oxides comprising aluminium and phosphorus may be deposited onto flat surfaces and fibres by atomic layer deposition (ALD), using alkyl phosphates and aluminium trichloride, or trimethyl aluminium, as alternating precursors, or via thermally induced chemical vapour deposition, using metal‐organic single‐source precursors such as [Me 2 AlO 2 P(O t Bu) 2 ] 2 , or mixtures of phosphoryl trichloride, aluminium trichloride, and oxygen as precursors …”

Section: Introductionmentioning

confidence: 99%

Coating of Alumina Fibres With Aluminium Phosphate by a Continuous Chemical Vapour Deposition Process

Stöckel

Ebert

Böttcher

et al. 2014

Chemical Vapor Deposition

Self Cite

View full text Add to dashboard Cite

We developed aluminium phosphate-coated alumina fibres with significantly improved pull-out properties, which may be suitable for reinforcing advanced inorganic composites qualified for operating temperatures up to 1200°C. Aluminium phosphate layers are generated on the surface of alumina fibres using a continuous chemical vapour deposition (CVD) process: At furnace temperatures between 850°C and 1050°C, within a tube reactor heated by an electrical furnace, the alumina fibres are exposed to gas mixtures of phosphoryl trichloride and oxygen, inducing dense aluminium phosphate layers on the fibre surface. Mini-composites were prepared by embedding the coated fibres into an alumina matrix.

show abstract

Nonaqueous Atomic Layer Deposition of Aluminum Phosphate

Cited by 24 publications

References 30 publications

Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

Synthesis of Iron Phosphate and Their Composites for Lithium/Sodium Ion Batteries

Coating of Alumina Fibres With Aluminium Phosphate by a Continuous Chemical Vapour Deposition Process

Contact Info

Product

Resources

About