Nonadditive sputtering of silicon by keV energy molecular projectiles of heavy and light elements

Belykh, S. F.; Kovarsky, A.P.; Palitsin, Vladimir; Adriaens, Annemie; Adams, F.

doi:10.1016/s1387-3806(01)00489-4

Cited by 18 publications

(17 citation statements)

References 32 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This was interpreted to show an anomalously high non-additivity of sputtering by the gold clusters. Very similar results were observed for Nb [16], Si [17], and V [18] sputtered by Au n Ϫ clusters and for Si sputtered by Al n Ϫ clusters [19]. Baudin et al [20] also show results following this exponential law for t Ͼ 3 for C t Ϫ sputtered from carbon foils by 20 MeV C 60 ϩ primary ions both in transmission and reflection.…”

supporting

confidence: 58%

“…This does not, of course, prove that eq 2 is incorrect for other systems, since that too conforms to eq 4. It is useful, therefore, to revisit some of the data exhibiting the exponential dependence, and here we have selected the extensive data of Belykh et al [19] for the sputtering of Si by Au n Ϫ 1 Յ n Յ 3, which represents the elemental system closest to that studied above. The results of Belykh et al [19] for sputtering with 9 and 18 keV beams are shown in Figure 2a by the open symbols.…”

Section: ‫ء‬mentioning

confidence: 99%

“…The values of the constants, C n , depend on the relative intensity scale chosen by Belykh et al [19] in their paper. These are not yields but relative yields.…”

Section: ‫ء‬mentioning

confidence: 99%

“…Structure in the divergencies in the data as a function of t, from the smooth dependencies of either eq 2 or eq 3, can be used to test if eq 4 applies to inorganic and elemental solids as well as organics. Inspection of the data of Belykh et al [19] for Si show a suitable structure in the divergence from a smooth dependence on t, and this is analyzed below. Data for Si are a good test since the low mass of Si ensures that any detector efficiency changes are minimized.…”

mentioning

confidence: 96%

“…It is important to understand if this is a generic effect in SIMS or if it is limited, in some way, to organic materials. One of the major sets of work on the intensities of many secondary ions as a function of cluster primary ion size is the study of the sputtering of elemental solids by Belykh and coworkers [13][14][15][16][17][18][19]. These studies show the relative intensities of fragments such as M t Ϯ , where 1 Յ t Յ 20 for the sputtering of M ϭ Nb, Si, and Ta.…”

mentioning

confidence: 99%

See 4 more Smart Citations

Relationships between cluster secondary ion mass intensities generated by different cluster primary ions

Seah

Green

Gilmore

2010

J. Am. Soc. Mass Spectrom.

View full text Add to dashboard Cite

Measurements are described to evaluate the constitution of secondary ion mass spectra for both monatomic and cluster primary ions. Previous work shows that spectra for different primary ions may be accurately described as the product of three material-dependent component spectra, two being raised to increasing powers as the cluster size increases. That work was for an organic material and, here, this is extended to (SiO 2 ) t OH Ϫ clusters from silicon oxide sputtered by 25 keV Bi n ϩ cluster primary ions for n ϭ 1, 3, and 5 and 1 Յ t Յ 15. These results are described to a standard deviation of 2.4% over 6 decades of intensity by the product of a constant with a spectrum, H SiOH ‫ء‬ , and a power law spectrum in t. This evaluation is extended, using published data for Si t ϩ sputtered from Si by 9 and 18 keV Au Ϫ and Au 3 Ϫ , with confirmation that the spectra are closely described by the product of a constant with a spectrum, H Si ‫ء‬ , and a simple spectrum that is an exponential dependence on t, both being raised to appropriate powers. This is confirmed with further published data for 6, 9, 12, and 18 keV Al Ϫ and Al 2 Ϫ primary cluster ions. In all cases, the major effect of intensity is then related to the deposited energy of the primary ion at the surface. The constitution of SIMS spectra, for monatomic and cluster primary ion sources, is shown, in all cases, to be consistent with the product of a constant with two component spectra raised to given powers. (J Am Soc Mass Spectrom 2010, 21, 370 -377) © 2010 American Society for Mass Spectrometry T he analysis of complex molecules in SIMS has been enhanced in recent years by the application of primary cluster ions of the type Au n Ϯ , Bi n ϩ , C 60 nϩ , etc. These provide significantly higher yields of the larger fragments that are important in the analysis of larger molecules. Over the years, there has not been a great focus on the relative intensities of the many secondary ions in the spectrum and their changes with the change in primary ion cluster size and energy. Analysts have usually focused on the enhancement of intensity of a particular characteristic ion obtained when using larger cluster primary ions. However, the fragment ions in the spectrum can be used to construct the structure of the molecules or the arrangement of atoms at a surface as well as provide important data as a function of depth in depth profiles [1][2][3][4][5][6][7][8]. Studies of the whole secondary ion spectrum and its evolution from one primary ion source to another are an important part of the infrastructure to the whole field of secondary ion mass spectrometry.Much historical data and data in spectral libraries [9 -11] are for inert gas primary ions. Over the years, the primary ion sources used have changed and changed again. Different spectrometer manufacturers fit different primary ion sources. It is important, therefore, if analysts are to make the best use of their instruments and of the published literature and data sources, that the relationships for the secondary ion ...

show abstract

supporting

confidence: 58%

Section: ‫ء‬mentioning

confidence: 99%

“…The values of the constants, C n , depend on the relative intensity scale chosen by Belykh et al [19] in their paper. These are not yields but relative yields.…”

Section: ‫ء‬mentioning

confidence: 99%

mentioning

confidence: 96%

mentioning

confidence: 99%

See 3 more Smart Citations

Relationships between cluster secondary ion mass intensities generated by different cluster primary ions

Seah

Green

Gilmore

2010

J. Am. Soc. Mass Spectrom.

View full text Add to dashboard Cite

show abstract

Water‐Soluble Self‐Assembled Butadiyne‐Bridged Bisporphyrin: A Potential Two‐Photon‐Absorbing Photosensitizer for Photodynamic Therapy

Ogawa

Satake

et al. 2007

Chemistry A European J

View full text Add to dashboard Cite

We have synthesized a novel, two-photon-absorbing photosensitizer for two-photon-absorption photodynamic therapy (2PA-PDT). The molecule is a butadiyne-bridged porphyrin dimer terminated with two water-soluble porphyrin monomers connected through Zn-imidazolyl self-assembly and covalently linked through olefin metathesis. It has an effective two-photon-absorption (2PA) cross-section value, sigma((2)), of 33 000+/-4600 GM with 5-ns pulses at 890 nm measured by using the open-aperture Z-scan technique. The compound was found to generate singlet oxygen, cytotoxic for tumor cells in photodynamic therapy (PDT), under 2PA conditions by conducting photobleaching experiments with anthracene-9,10-dipropionic acid sodium salt (ADPA).

show abstract

Current literature in mass spectrometry

2002

J. Mass Spectrom.

View full text Add to dashboard Cite

In order to keep subscribers up‐to‐date with the latest developments in their field, John Wiley & Sons are providing a current awareness service in each issue of the journal. The bibliography contains newly published material in the field of mass spectrometry. Each bibliography is divided into 11 sections: 1 Books, Reviews & Symposia; 2 Instrumental Techniques & Methods; 3 Gas Phase Ion Chemistry; 4 Biology/Biochemistry: Amino Acids, Peptides & Proteins; Carbohydrates; Lipids; Nucleic Acids; 5 Pharmacology/Toxicology; 6 Natural Products; 7 Analysis of Organic Compounds; 8 Analysis of Inorganics/Organometallics; 9 Surface Analysis; 10 Environmental Analysis; 11 Elemental Analysis. Within each section, articles are listed in alphabetical order with respect to author (4 Weeks journals ‐ Search completed at 12th. Dec. 2001)

show abstract

Nonadditive sputtering of silicon by keV energy molecular projectiles of heavy and light elements

Cited by 18 publications

References 32 publications

Relationships between cluster secondary ion mass intensities generated by different cluster primary ions

Relationships between cluster secondary ion mass intensities generated by different cluster primary ions

Water‐Soluble Self‐Assembled Butadiyne‐Bridged Bisporphyrin: A Potential Two‐Photon‐Absorbing Photosensitizer for Photodynamic Therapy

Current literature in mass spectrometry

Contact Info

Product

Resources

About