2011
DOI: 10.1002/adma.201003993
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Non‐Volatile Photochemical Gating of an Epitaxial Graphene/Polymer Heterostructure

Abstract: Electronic devices using epitaxial graphene on Silicon Carbide require encapsulation to avoid uncontrolled doping by impurities deposited in ambient conditions. Additionally, interaction of the graphene monolayer with the substrate causes relatively high level of electron doping in this material, which is rather difficult to change by electrostatic gating alone.Here we describe one solution to these problems, allowing both encapsulation and control of the carrier concentration in a wide range. We describe a no… Show more

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Cited by 136 publications
(151 citation statements)
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“…Stable and lowresistance contacts (<10 in the quantum Hall regime) were fabricated by an optimized two-step metallization process, Ti/Au (10 nm/30 nm) followed by Au (50 nm), which enables direct contact between the second gold layer and the graphene edge [33]. Photochemical gating [34] was applied to reduce the charge-carrier concentration by covering the sample with two polymers (70 nm of poly(methyl methacrylate) [PMMA] resist followed by 300 nm of ZEP520A resist) and subsequent ultraviolet (UV) radiation at room temperature. The main results were confirmed on three different devices.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Stable and lowresistance contacts (<10 in the quantum Hall regime) were fabricated by an optimized two-step metallization process, Ti/Au (10 nm/30 nm) followed by Au (50 nm), which enables direct contact between the second gold layer and the graphene edge [33]. Photochemical gating [34] was applied to reduce the charge-carrier concentration by covering the sample with two polymers (70 nm of poly(methyl methacrylate) [PMMA] resist followed by 300 nm of ZEP520A resist) and subsequent ultraviolet (UV) radiation at room temperature. The main results were confirmed on three different devices.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Photochemical gating was used to control the carrier density on the epitaxial devices due to the impossibility of conventional backgating through SiC. 15 CVD graphene was grown on thin-film copper, subsequently transferred to Si/SiO 2 , and contacts were made using chromegold tracks / bond pads followed by gold-only final contacting, as described in our previous work. 13 Various sizes of largearea Hall bar were produced; dimensions were typically 64 × 16 μm 2 for the CVD devices, and 160 × 35 μm 2 for the epitaxial devices.…”
Section: Methodology and Theoretical Backgroundmentioning
confidence: 99%
“…10 In a wide perspective, graphene is a material with potential as a versatile and controllable bridge between the atomic and the micron scales, with unique opportunities for nanoelectronics applications. Chemistry tools may alter graphene properites either globally (for example, chemical gating) 11 or locally (atoms and molecules bound to graphene). 12,13 At the same time, modern lithographic techniques compatible with semiconducting technology can be used to pattern graphene into devices and integrate them with conventional electronics.…”
Section: Introductionmentioning
confidence: 99%