Non-silicon MEMS platforms for gas sensors

Vasiliev, Alexey; Pisliakov, A.V.; Соколов, А. В.; Samotaev, Nikolay; Soloviev, Sergey; Oblov, Konstantin; Guarnieri, V.; Lorenzelli, Leandro; Brunelli, J.; Maglione, A.; Липилин, А. С.; Mozalev, Alexander; Legin, Andrey

doi:10.1016/j.snb.2015.10.066

Cited by 85 publications

(37 citation statements)

References 31 publications

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“…With MOS sensing layer deposited on SiO2/Si3N4 MEMS substrate (Rheater = 117 Ohm at 20 °C, FBK, Trento, Italy) we achieved the working temperature up to 370 °C. Thick film sensors, thermocatalytic sensors, and silicon MEMS sensors are described in [1], ceramic MEMS is presented in [2]. Response of thermocatalytic sensor to methane concentrations.…”

Section: Resultsmentioning

confidence: 99%

Plug-and-Play Electronic Unit for MOS and Thermocatalytic Gas Sensors

Vasiliev

Merzlikin²,

Shakhnovich³

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:The electronic plug-and-play electronic unit for controlling the semiconductor and thermocatalytic sensors is described. This is a controller with standard UART interface, which maintain preset working temperature of the sensor, measures resistance of the sensing layer, makes linearization of the sensitivity curve, compensates ambient humidity. In the case of thermocatalytic sensor, it measures power necessary to heat sensing and reference elements of the sensor, and the difference in these two values of power is proportional to the gas concentration. The digital output signal contains information about gas concentration, working parameters of the sensor, sensor type, enabling plug-and-play operation mode.

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Section: Resultsmentioning

confidence: 99%

Plug-and-Play Electronic Unit for MOS and Thermocatalytic Gas Sensors

Vasiliev

Merzlikin²,

Shakhnovich³

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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“…In this figure, the power consumption of the microheaters with the thickness of platinum layer of ~1 and ~3 μm (heater resistance of 60 and 20 Ohm, respectively) is presented. Our assumption was the application of thin LTCC with low heat conductivity of ~3 W/m·K would allow a significant decease in power consumption compared to the application of this alumina substrates described in [3], for example, because the power consumption of alumina exceed the power consumption of LTCC by a factor of 7 approximately. In [3], we used alumina with thickness of 12 μm obtained by anodic oxidation of aluminum as a substrate for the deposition of platinum microheater with approximately the same size as in this work.…”

Section: Experiments and Discussionmentioning

confidence: 99%

“…Our assumption was the application of thin LTCC with low heat conductivity of ~3 W/m·K would allow a significant decease in power consumption compared to the application of this alumina substrates described in [3], for example, because the power consumption of alumina exceed the power consumption of LTCC by a factor of 7 approximately. In [3], we used alumina with thickness of 12 μm obtained by anodic oxidation of aluminum as a substrate for the deposition of platinum microheater with approximately the same size as in this work. The results of [3] demonstrated that power consumption of the microheater is of about 70 mW at 450 °C.…”

Section: Experiments and Discussionmentioning

confidence: 99%

“…In [3], we used alumina with thickness of 12 μm obtained by anodic oxidation of aluminum as a substrate for the deposition of platinum microheater with approximately the same size as in this work. The results of [3] demonstrated that power consumption of the microheater is of about 70 mW at 450 °C.…”

Section: Experiments and Discussionmentioning

confidence: 99%

“…Though the power consumption of MEMS devices based on LTCC is higher than the power consumption of alumina MEMS [3] or, especially, silicon MEMS devices, the application of LTCC has obvious advantage, because LTCC green tape is cheap commercially available product. Gas sensor microheater fabricated using LTCC ceramics [2].…”

Section: Introductionmentioning

confidence: 99%

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MEMS Sensors Based on Very Thin LTCC

Vasiliev

Nisan²,

Potapov³

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:The application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we found a possibility to fabricate thin LTCC membranes (20-30 μm) stretched on a frame made of 100 μm thick LTCC. Aerosol jet printed Pt microheater and laser cutting of the membrane gave a cantilever shaped microhotplate with hot spot of about 300 × 300 μm. Power consumption of the heater is ~150 mW at 450 °C.

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