2016
DOI: 10.1177/0142331216630363
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Non-linear optimal fuzzy control synthesis for robust output tracking of uncertain micro-electro-mechanical systems

Abstract: This paper considers the output tracking problem for micro-electro-mechanical systems (MEMS) under uncertainties and external disturbances. The robust non-linear controllers are designed by two methods. The first method consists of a backstepping strategy combined with a first-order sliding mode controller. Also, in order to reduce the chattering effect and to improve the robustness of the proposed scheme, a new variable universe fuzzy control action with an adaptive coefficient is used instead of the signum f… Show more

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Cited by 5 publications
(3 citation statements)
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References 44 publications
(33 reference statements)
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“…It is not blowing it out of proportion that applying various control algorithms to MEMS devices to yield error subside and a better performance is a nonnegligible problematic issue [9][10][11][12][13][14]. In addition, adaptive and robust control methods lie in the center of meticulousness and challenge due to deficiency in modeling of MEMS devices and the parametric uncertainties in fabrication procedures [15][16][17][18][19][20][21][22].…”
Section: Introductionmentioning
confidence: 99%
“…It is not blowing it out of proportion that applying various control algorithms to MEMS devices to yield error subside and a better performance is a nonnegligible problematic issue [9][10][11][12][13][14]. In addition, adaptive and robust control methods lie in the center of meticulousness and challenge due to deficiency in modeling of MEMS devices and the parametric uncertainties in fabrication procedures [15][16][17][18][19][20][21][22].…”
Section: Introductionmentioning
confidence: 99%
“…The corresponding application field is vast and sometimes astonishing! Furthermore, adaptive and robust control techniques remain at the focus of researchers' awareness on the ground of defects in modelling of MEMS and parametric uncertainties in their manufacturing procedures [13][14][15][16][17][18]. Adaptive sliding mode control is one of the most popular methods in MEMS or other mechatronic systems dynamics and control research since it copes with parameter uncertainty and disturbance rejection simultaneously [19][20][21][22].…”
Section: Introductionmentioning
confidence: 99%
“…Output tracking is a common problem encountered in many practical applications – for example, trajectory tracking for manipulators (Wang and Deng, 2013), tracking problems for micro-electro-mechanical systems (Modirrousta et al, 2017), attitude tracking for autonomous airships (Wang et al, 2016), and others. There are many well-known contributions to trajectory tracking problems for models of practical systems (Li et al, 2017; Xu et al, 2015, Xu et al, 2016); for example, the output regulation methods (Ali et al, 2016; Isidori and Byrnes, 1990) and the differential flatness approaches (Fliess et al, 1998; Ryu and Agrawal, 2011).…”
Section: Introductionmentioning
confidence: 99%