Non-linear effect of gold cluster ion induced damage in silicon

Liu, J.R; Wang, X.M; Shao, Lin; Chen, H; Chu, W. K.

doi:10.1016/s0168-583x(02)01357-5

Cited by 7 publications

(1 citation statement)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The photoacoustic launch pad was created by Au ion implantation in a 0.5-mm-thick quartz window at 60 keV to a dose of 6 ×10 16 per cm square (12–16). The acceleration voltage was chosen so that Au ions are implanted within 50 nm below the surface (12).…”

Section: Resultsmentioning

confidence: 99%

Gold-implanted plasmonic quartz plate as a launch pad for laser-driven photoacoustic microfluidic pumps

Yue

Lin

Zhang

et al. 2019

Proc. Natl. Acad. Sci. U.S.A.

View full text Add to dashboard Cite

Enabled initially by the development of microelectromechanical systems, current microfluidic pumps still require advanced microfabrication techniques to create a variety of fluid-driving mechanisms. Here we report a generation of micropumps that involve no moving parts and microstructures. This micropump is based on a principle of photoacoustic laser streaming and is simply made of an Au-implanted plasmonic quartz plate. Under a pulsed laser excitation, any point on the plate can generate a directional long-lasting ultrasound wave which drives the fluid via acoustic streaming. Manipulating and programming laser beams can easily create a single pump, a moving pump, and multiple pumps. The underlying pumping mechanism of photoacoustic streaming is verified by high-speed imaging of the fluid motion after a single laser pulse. As many light-absorbing materials have been identified for efficient photoacoustic generation, photoacoustic micropumps can have diversity in their implementation. These laser-driven fabrication-free micropumps open up a generation of pumping technology and opportunities for easy integration and versatile microfluidic applications.

show abstract