2021
DOI: 10.48550/arxiv.2112.12242
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Non-invasive imaging of three-dimensional integrated circuit activity using quantum defects in diamond

Abstract: The continuous scaling of semiconductor-based technologies to micron and sub-micron regimes has resulted in higher device density and lower power dissipation. Many physical phenomena such as self-heating or current leakage become significant at such scales, and mapping current densities to reveal these features is decisive for the development of modern electronics. However, advanced non-invasive technologies either offer low sensitivity or poor spatial resolution and are limited to two-dimensional spatial mapp… Show more

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Cited by 3 publications
(3 citation statements)
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References 51 publications
(56 reference statements)
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“…However, microwave near-field distribution imaging for micro-monopole antennas has been a long-standing demand. Traditional measurement methods have obvious shortcomings in non-invasiveness, measurement efficiency and imaging accuracy [ 25 ]. Although these deficiencies can be compensated for using the compensation algorithm to a certain extent, it undoubtedly increases the preparation time of measurement work and affects the measurement efficiency of the antenna.…”
Section: Discussionmentioning
confidence: 99%
“…However, microwave near-field distribution imaging for micro-monopole antennas has been a long-standing demand. Traditional measurement methods have obvious shortcomings in non-invasiveness, measurement efficiency and imaging accuracy [ 25 ]. Although these deficiencies can be compensated for using the compensation algorithm to a certain extent, it undoubtedly increases the preparation time of measurement work and affects the measurement efficiency of the antenna.…”
Section: Discussionmentioning
confidence: 99%
“…Clement et al [35] have developed a Bayesian technique to model currents at the image boundary, which are otherwise a major source of artifacts. Garsi et al [36] have tackled the 3D reconstruction problem for the analysis of integrated circuits. Their method groups current sources (modeled as elements of an infinite wire) into different depth classifications, and then runs the 2D reconstruction algorithm on each plane of sources separately.…”
Section: Discussionmentioning
confidence: 99%
“…A powerful method is to embed a single NV spin into a diamond scanning probe, which enables imaging with 50 nm spatial resolution and quantitative determination of monolayer magnetizations 22,24 . A second approach is to deposit a 2D magnet directly onto a diamond chip hosting a high density of near-surface NV spins 23,[31][32][33][34][35] . This approach benefits from a strong signal due to a large number of NV spins.…”
Section: Introductionmentioning
confidence: 99%