Non-Integral Depth Measurement of High-Aspect-Ratio Multi-Layer Microstructures Using Numerical-Aperture Shaped Beams

Chein, Wei-Hsin; Yang, Fusheng; Thakur, Komal; Wu, Guowei; Chen, Liang-Chia

doi:10.2139/ssrn.4139613

SSRN Journal

2022

DOI: 10.2139/ssrn.4139613

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Non-Integral Depth Measurement of High-Aspect-Ratio Multi-Layer Microstructures Using Numerical-Aperture Shaped Beams

Wei-Hsin Chein

Fusheng Yang

Komal Thakur

et al.

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Non-Integral Depth Measurement of High-Aspect-Ratio Multi-Layer Microstructures Using Numerical-Aperture Shaped Beams

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