Non-destructive characterization of silicon nanowires and nanowire coatings using mid-infrared spectroscopy
S. Maryam Vaghefi Esfidani,
Daniel W. Keefe,
Fatima Toor
et al.
Abstract:Silicon nanowires (SiNWs) have attracted much attention owing to their potential applications in electronics and photonics, while remaining as a cost-effective material platform. Key material properties in engineering SiNWs for different applications include their length, density, and presence of oxides or other chemicals on the surface. However, monitoring these properties is challenging, as scanning electron microscopy and atomic force microscopy (AFM), which directly image the wires, require destructive cle… Show more
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