Non-contacting straightness measurement to nanometre accuracy

Virdee, M. S.

doi:10.1016/0890-6955(94)p2367-o

Cited by 12 publications

(7 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…To increase the accuracy of the measurement, it should also be considered that the errors are generated by environmental factors causing beam drift or random tremble. Virdee [11] has shown that the straightness reference using a laser beam is accurate to 4 nm over a distance of 0.3 m within thermal enclosures reducing the thermal gradients below 0.1 • C/0.3 m [11]. The experimental results of figure 7(b) imply the possibility of the noise cancellation by monitoring the reference signal obtained from the same laser beam at the furthermost down-stream sensor [15].…”

Section: Discussionmentioning

confidence: 99%

“…The method of using a laser beam as a straightness reference is widely used. The displacement is measured by monitoring the relative position to a reference laser beam [1,3,[6][7][8][9][10][11]. The straightness has been measured using an autocollimator [10], a laser interferometer [12], a theodolite and other conventional tools according to the size and accuracy to be measured.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Transmission-type position sensor for the straightness measurement of a large structure

Sasaki¹,

Takebe²,

Hane³

1999

J. Micromech. Microeng.

View full text Add to dashboard Cite

A new position sensor has been fabricated which is suitable for detecting the accurate straightness reference of a laser beam. This is achieved by fabricating a four-cell type photodiode inside a Si micro-mesh structure. This sensor does not disturb the direction or the wave front of the reference laser beam as it absorbs only some of the incident photons and transmits the rest down stream. The straightness of ∼1 m structures can be measured with ∼1 µm accuracy at many points by placing the sensors in series.

show abstract

Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Transmission-type position sensor for the straightness measurement of a large structure

Sasaki¹,

Takebe²,

Hane³

1999

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…The tilts of the surface are reconstructed from the tilts of the mirror, hence the straightness. The instruments typically used are based on angle sensors [ 3 ], angular interferometers [ 2 , 4 ] and autocollimators [ 5 ]. Alternatively, a level can be used for the same purpose [ 6 ].…”

Section: Introductionmentioning

confidence: 99%

Investigation on Modulation-Based Straightness Measurement

Egidi

Balsamo

Corona

et al. 2023

Sensors

View full text Add to dashboard Cite

The concept of a novel non-contacting technique for measuring straightness and its practical realization in a mechanical device are presented in this article. The device, called InPlanT, is based on the acquisition of the luminous signal retroreflected by a spherical glass target and impinged on a photodiode after mechanical modulation. The received signal is reduced to the sought straightness profile using dedicated software. The system was characterized with a high-accuracy CMM and the maximum error of indication was derived.

show abstract

“…The third is the laser beam straight datum (collimated laser) measuring method as used in these papers [17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32]. Most current research focuses on this method which includes the reflection confocal optical method [17][18][19] , energy center detection [20][21][22][23][24][25], energy change detection [26,27], autocollimator angular calculation [28] and retro-reflector method [29][30][31][32]. In this paper, a diode laser coupled with a singlemode optical fiber was applied as a collimating light.…”

Section: Introductionmentioning

confidence: 99%

A novel method to enhance the sensitivity for two-degrees-of-freedom straightness measurement

Kuang

Hong

Feng

et al. 2007

Meas. Sci. Technol.

View full text Add to dashboard Cite

A low cost and high precision system which can measure two-degrees-of-freedom straightness simultaneously is proposed based on a laser collimator. In the system, a miniature fiber coupled diode laser generates a collimating beam. The sensitivity of the straightness error measurement is magnified by a factor of 4 compared with the lateral movement of the retro-reflector itself after the multi-reflections. A Renishaw ML10 laser interference measurement system was used to verify the developed system in a series of experiments in the laboratory environment. Experimental results agree with the expected results. The two-dimensional straightness error measurement had linear correlativity close to 1 and the standard one-to-one deviation error was better than 0.32 µm obtained over a travel range of 600 µm.

show abstract

Non-contacting straightness measurement to nanometre accuracy

Cited by 12 publications

References 6 publications

Transmission-type position sensor for the straightness measurement of a large structure

Transmission-type position sensor for the straightness measurement of a large structure

Investigation on Modulation-Based Straightness Measurement

A novel method to enhance the sensitivity for two-degrees-of-freedom straightness measurement

Contact Info

Product

Resources

About