2021
DOI: 10.35848/1882-0786/abf444
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Non-contact local conductivity measurement of metallic nanowires based on semi-near-field reflection of microwave atomic force microscopy

Abstract: In this study, a non-contact and quantitative evaluation method was developed to measure the conductivity of metallic nanowires with a nanometer-scale spatial resolution. A coaxial probe was experimentally fabricated; using this probe, microwave images of the Al, Ag, and Cu nanowires and their topography images were simultaneously obtained via microwave atomic force microscopy (M-AFM) in the non-contact mode. A semi-near-field reflection model was established to describe the spatial distribution of a microwave… Show more

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