Plastic deformation is a common occurrence in metallic alloys, exerting a substantial influence on both mechanical and electrical properties. Unanticipated plastic deformation may compromise material toughness, causing crack initiation and reducing the expected lifetime of critical components. The concept of dislocations is central to understanding the plastic behavior of crystalline alloys (Ashby, 1970). The intricate processes of dislocation generation, movement, accumulation, and interaction dominate plastic deformation dynamics (Ashby, 1970). Numerous studies have investigated the dislocation behavior in metallic alloys during the plastic deformation process (Muránsky et al., 2019;Schayes et al., 2016;Zhu et al., 2016). A thorough understanding of dislocations can help in investigating and understanding the plastic behavior of metallic materials during plastic deformation. On a deeper level, a precise estimation of dislocation densities aids in evaluating its forming degree and the remaining life of critical components such as the turbine blades (Kobayashi et al., 2012;Yang et al., 2024). This insight enhances our understanding of material Abstract Metallic materials are widely employed due to their exceptional mechanical attributes. Plastic deformation is a common issue that influences both the mechanical and electrical properties, with profound implications for the longevity of engineered structures and components. Dislocation density is the core factor in the plastic deformation process. Traditional methods for the evaluation of dislocation density include electron backscatter diffraction (EBSD), transmission electron microscopy (TEM), and x-ray diffraction (XRD), requiring meticulous specimen preparation and sophisticated equipment posing challenges for industry-wide fitness-forservice (FFS) monitoring. To address these challenges, a non-contact method to quantitatively evaluate the dislocation density in stainless steel 316L (SUS316L) by employing a microwave reflection method is reported in this study. A dedicated microwave measurement system, coupled with a coaxial line sensor, was used to measure the amplitude of the reflection coefficient of the microwave signal at a constant standoff distance and frequency, closely associated with the electrical resistivity of the SUS316L specimens, a parameter that exhibits variation in response to changes in dislocation density. The results indicate a proportional increase in the amplitude of the microwave signal with higher dislocation density. By establishing a linear correlation, we demonstrate the feasibility of evaluating dislocation density with a minimum detectable difference of 1.824 × 10 13 m -2 using the dedicated microwave system under the designed conditions in this study. This approach holds promise for better understanding and monitoring of plastic deformation in metallic materials across various applications.