Non-conjugated cyclic dienes and maleic anhydride co-polymers, and derivatives for base resin of deep UV resist.

Design, Synthesis, and Evaluation of a Novel Amphiphilic Alicyclic Polymer Having γ-Hydroxy Acid Structure

“…In the infrared spectrum of copolymer 2 , the carbonyl group of the acid anhydride appeared at 1860 and 1780 cm -1 , the ether linkage of the acid anhydride appeared at 1079 and 922 cm -1 , and the alkyl group appeared at 2945 and 2880 cm -1 . No remarkable olefin proton due to unreacted double bond of the diene was observed in the 1 H NMR spectrum .…”

“…According to the literature, , copolymerization between 3 and maleic anhydride involves an addition cyclization process yielding a 1:1 alternating copolymer. As a result, these copolymers had an alicyclic main chain and anhydride moiety, as shown in Scheme .…”

“…Polymer 1 was synthesized as shown in Scheme . Copolymerization of 3 and maleic anhydride was done in tetrahydrofuran (THF) for 7 h using 2,2‘-azobis(isobutyronitrile) (3.9 mol %) as the initiator according to the literature. , The initial molar ratio of 3 to maleic anhydride was 1:1.…”