Noise sensitivity of a mass detection method using vibration modes of coupled microcantilever arrays

Ryan, Teresa J.; Judge, John A.; Vignola, Joseph F.; Glean, Aldo A.

doi:10.1063/1.4737636

Cited by 17 publications

(9 citation statements)

References 27 publications

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“…DeMartini, Rhoads, Shaw, and Turner (2007); DeMartini et al, 2008) extended the approach to a coupled array of sensors that allowed for a single readout for all the sensor elements. Spletzer, Raman, Reifenberger, Wu, and Xu (2005), Spletzer, Raman, Sumali, and Sullivan (2008), Spletzer, Raman, Wu, Xu, and Reifenberger (2006), Thiruvenkatanathan, Woodhouse, Yan, and Seshia (2011), Thiruvenkatanathan, Yan,Woodhouse, Aziz, and Seshia (2010), and Ryan, Judge, Vignola, and Glean (2012) were among the first to investigate capitalizing on the coupling between sensing elements as a mechanism to improve the performance of a given mass sensor design. In these cases, measured system response shape changes were used to infer variations in the mass distribution as a result of mass adsorption and subsequent localization of vibration energy.…”

Section: Introductionmentioning

confidence: 99%

Time‐domain chemical vapour mass sensor using a functionalized subordinate array

Glean¹,

Sonne

Judge

et al. 2020

Med Devices & Sens

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This work describes a chemical vapour detection scheme based on observing changes in the time‐domain impulse response of a single structure to which an array of smaller cantilevers is attached. The distribution of properties of the cantilevers in the array is chosen to transfer vibration energy to the array and confine it there for a specified duration τ. Accumulation of added mass on the cantilevers changes the array properties, altering the duration for which energy is confined. When every second cantilever is functionalized to adsorb mass, a portion of the vibration energy returns to the primary structure in half the original time. The amount of added mass can be estimated by comparing the vibration energy in the primary structure to the total energy in the array at the return time τ/2. Numerical analysis is used to investigate the performance of the proposed detection scheme. It is shown that increasing the number of sensing elements reduces errors in mass predictions due to mass adsorption variability and increases mass sensitivity. However, reducing the number of sensing elements improves the signal‐to‐noise ratio. These opposing effects require consideration for a specific sensing application. Experimental results using a centimetre scale prototype demonstrate feasibility of this interferometric approach for MEMS‐scale implementation.

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Section: Introductionmentioning

confidence: 99%

Time‐domain chemical vapour mass sensor using a functionalized subordinate array

Glean¹,

Sonne

Judge

et al. 2020

Med Devices & Sens

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“…Fabrication errors or uncertainty can have detrimental effects on the realized performance of systems fabricated with a given design strategy. Philosophically, this robustness issue can be expressed in terms of the sensitivity of a design to error in the distributions of the oscillators [4,5].…”

Section: Introductionmentioning

confidence: 99%

Subordinate Oscillator Arrays: Physical Design and Effects of Error

Sterling,

Paruchuri,

Ryan

et al. 2020

Preprint

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Prior work demonstrates that an attached subordinate oscillator array (SOA) can attenuate vibration of a host structure over a frequency range of interest. A judicious choice of the distribution of masses and stiffnesses of the attached oscillators can result in a relatively flat frequency response of for the host structure over a desired band. This response modification can be a significant improvement over classical dynamic vibration absorbers (DVA) that attenuate a structure's response at one target frequency while increasing the frequency response amplitude at nearby side frequencies. Performance of the SOA can be highly sensitive to the uncertainty or disorder in the mechanical properties of the system. This paper introduces a novel design strategy that can make use of either 3D-printing or piezoelectric SOAs (PSOAs). These strategies have the potential to address and ameliorate such sensitivity to error. It is important to note that the design strategy is simple and effective in that it can be carried out without computational optimization techniques by choosing simple or well-known distributions of properties.

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“…Mode localization has also been used in accelerometers [27] and light processing applications [28]. Previous reports highlight the influence of various system parameters such as the mass-ratio [24], measurement noise [23], non-ideal clamping [29], coupling stiffness [30], anisotropy of the Youngs modulus [31], and global and dissipative coupling [32] on the array dynamics. In these arrayed structures, vibrations are possible only within the allowed propagation band [33], defined as the interval of frequencies between the lower ( f L ) and the upper ( f U ) cut-off values.…”

Section: Introductionmentioning

confidence: 99%

“…In these arrayed structures, vibrations are possible only within the allowed propagation band [33], defined as the interval of frequencies between the lower ( f L ) and the upper ( f U ) cut-off values. While most of the previous studies were focused on arrays of identical or almost identical beams [23, 26, 33–36], relatively few works considered the case of beams with differing resonant frequencies [13,21,37,38].…”

Section: Introductionmentioning

confidence: 99%

Actuation of Higher Harmonics in Large Arrays of Micromechanical Cantilevers for Expanded Resonant Peak Separation

Dick

Grutzik

Wallin

et al. 2018

Journal of Vibration and Acoustics

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A large array of elastically coupled micro cantilevers of variable length is studied experimentally and numerically. Full-scale finite element modal analysis is implemented to determine the spectral behavior of the array and to extract a global coupling matrix. A compact reduced order model is used for numerical investigation of the array’s dynamic response. Our model results show that at a given excitation frequency within a propagation band, only a finite number of beams respond. Spectral characteristics of individual cantilevers, inertially excited by an external piezoelectric actuator, were measured in vacuum using laser interferometry. The theoretical and experimental results collectively show that the resonant peaks corresponding to individual beams are clearly separated when operating in vacuum at the 3rd harmonic. Distinct resonant peak separation, coupled with the spatially-confined modal response, make higher harmonic operation of tailored, variable-length cantilever arrays well suited for a variety of resonant based sensing applications.

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Noise sensitivity of a mass detection method using vibration modes of coupled microcantilever arrays

Cited by 17 publications

References 27 publications

Time‐domain chemical vapour mass sensor using a functionalized subordinate array

Time‐domain chemical vapour mass sensor using a functionalized subordinate array

Subordinate Oscillator Arrays: Physical Design and Effects of Error

Actuation of Higher Harmonics in Large Arrays of Micromechanical Cantilevers for Expanded Resonant Peak Separation

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