1997
DOI: 10.1063/1.119799
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Noise performances in polycrystalline silicon thin-film transistors fabricated by excimer laser crystallization

Abstract: A systematic study of the noise performances of polycrystalline silicon (polysilicon) thin-film transistors (TFTs) made by excimer laser crystallization is presented. The drain current spectral density of these devices shows an evident 1/f behavior and the origin of the noise was attributed to carrier number fluctuations. The flat-band voltage spectral density was found to be strongly correlated with the field-effect mobility, suggesting that the microscopic mechanism causing the carrier number fluctuations in… Show more

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Cited by 21 publications
(8 citation statements)
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“…On the other hand, in the case of mobility fluctuations in the channel, S I is proportional to I instead of I 2 . Previous studies 11,13 of the current dependence of S I indicated that the 1/f noise in poly-Si TFTs was due to number fluctuations. However, it was concluded that the high 1/f noise was controlled by the localized states at the grain boundaries rather than by interfacial oxide traps.…”
Section: Noise An Interface or Channel Effectmentioning
confidence: 90%
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“…On the other hand, in the case of mobility fluctuations in the channel, S I is proportional to I instead of I 2 . Previous studies 11,13 of the current dependence of S I indicated that the 1/f noise in poly-Si TFTs was due to number fluctuations. However, it was concluded that the high 1/f noise was controlled by the localized states at the grain boundaries rather than by interfacial oxide traps.…”
Section: Noise An Interface or Channel Effectmentioning
confidence: 90%
“…For example, it has been reported that the channel noise of poly-Si TFTs was much higher than that of c-MOSFETs. 12,13,16 It is expected that ␣-Si:H TFTs produce even more channel 1/f noise, in which case we may neglect the noise contribution from the series resistors. Therefore, we may write the total noise in ␣-Si:H TFTs as:…”
Section: B Noise Propertiesmentioning
confidence: 99%
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“…Recently, the carrier number fluctuation model with and without correlated mobility fluctuation ( nmodel) has been used to explain poly-Si TFT noise behaviors and estimate trap density. [8][9][10][11][12][13] To determine the dominant reason for the electrical degradation in LTPS TFT, this study now analyzes the LFN using the nmodel and the trap densities are extracted. To confirm the effectiveness of the LFN analysis, a quantitative analysis of the trap density at a grain boundary is performed following the methods of …”
Section: Introductionmentioning
confidence: 99%
“…[2][3][4] However, conventional self-aligned polysilicon TFTs present several undesirable effects, 7,8 induced by the presence of intense electric fields at the drain junction. 1-6 In particular, it has been shown that self-aligned polysilicon TFTs are characterized by a strong 1/f noise, 1-6 whose origin has been attributed to carrier number fluctuations.…”
mentioning
confidence: 99%