Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

Zhao, Maoyuan; Qi, Yang; Zhang, Xiaopeng; Li, Bo; Jiang, Zhuangde; Wei, Xueyong

doi:10.1109/jsen.2021.3128534

Cited by 8 publications

(3 citation statements)

References 42 publications

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“…[28] To reduce the noise of the accelerometer, the team systematically analyzed the primary noise sources of the accelerometer and reduced the sensor noise from 11 μg Hz −1/2 to 330 ng Hz −1/2 through the modulation and demodulation techniques. [29] To simplify the optical path and improve the stability of the FP MEMS accelerometer, the fiber FP MEMS accelerometer, which is directly formed by the fiber end and inertial mass sidewall, is researched. Taghavi et al designed a fiber FP MEMS accelerometer with four L-beams fabricated by SU-8 (Figure 7a), obtaining sensitivity, resonant frequency, and range as follows: 12.5 μW g −1 , 1872 Hz and ±1 g, respectively.…”

Section: Fabry-perot Accelerometermentioning

confidence: 99%

“…[ 28 ] To reduce the noise of the accelerometer, the team systematically analyzed the primary noise sources of the accelerometer and reduced the sensor noise from 11 µg Hz −1/2 to 330 ng Hz −1/2 through the modulation and demodulation techniques. [ 29 ]…”

Section: Classifications Of Optical Interferometric Mems Accelerometermentioning

confidence: 99%

“…The noise of the accelerometer is divided into two main categories according to the source, [ 124 ] Brownian noise(Noise Equivalent Accelerometer) NEA Brown and detection noise NEA Detect . Among them, the Brownian noise [ 29 ] is generated due to the thermal motion between air molecules, and it determines the limit of the Accelerometer's noise floor. Detection noise is introduced by the detection system of the accelerometer, which determines the actual output noise of the accelerometer.…”

Section: Critical Problems and Solutions For Optical Interferometric ...mentioning

confidence: 99%

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Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

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Section: Fabry-perot Accelerometermentioning

confidence: 99%

Section: Classifications Of Optical Interferometric Mems Accelerometermentioning

confidence: 99%