Noise Analysis and Characterization of a Sigma-Delta Capacitive Microaccelerometer

Külah, Haluk; Chae, Junseok; Yazdi, N.; Najafi, K.

doi:10.1109/jssc.2005.863148

Cited by 179 publications

(113 citation statements)

References 17 publications

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“…Recently published state of the art capacitive readout accelerometers show an accuracy that goes below µg-resolution [4,15,23]. These accelerometers are made with more advanced MEMS processes which allows them to increase the proof mass and sense capacitors.…”

Section: Measurement Resultsmentioning

confidence: 99%

“…The ratio of this change in capacitance to the applied acceleration is the mechanical sensitivity. The electrical sensitivity of the electronic readout circuit is then the ratio of the readout voltage to the change in capacitance.The two main noise sources in this system are the Brownian noise associated with the damping in the mechanical system and the electronic noise in the readout circuit [4]. In most designs, the electronic noise is dominant [3].…”

Section: Introductionmentioning

confidence: 99%

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A virtually floating dual-mass accelerometer

Bock

Woestyn

Raman

et al. 2013

Sensors and Actuators A: Physical

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A novel microelectromechanical system (MEMS) for the measurement of acceleration is presented. It combines a new mechanical structure consisting of two masses with a novel readout principle. The differential-mode displacement of the two proof masses corresponds to the applied acceleration and is embedded in a force-feedback loop. A new readout circuit is presented to give a readout proportional to this differential-mode. In addition, this new readout circuit has a control mechanism to operate the commonmode displacement of this dual-mass structure at the pull-in point. This increases the mechanical and electrical sensitivity.As a proof of concept, a prototype was designed for the complete system. The accuracy of the system is 4.1 µg/ √ Hz, which corresponds to the mechanical noise floor of the mechanical structure.

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Section: Measurement Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A virtually floating dual-mass accelerometer

Bock

Woestyn

Raman

et al. 2013

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

show abstract

“…There are charges on the electrode produced by anti-piezoelectric effect of quartz crystal which are then collected by the detection fork. The input angular rate cos !t can be detected by this process [1,2,3,4,5,6]. The electrical equivalent model of QVG can be described as Fig.…”

Section: Introductionmentioning

confidence: 99%

A high performance quartz vibrating gyroscope interface circuit driven by square-wave

Yin

Chen

et al. 2017

IEICE Electron. Express

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A new simple interface circuit for quartz vibrating gyroscope (QVG) driven by square-wave is presented in this paper. The interface circuit is composed of self-excited loop of driving circuit and detecting circuit. Temperature compensation, low noise and low coupling design are adopted in the circuit to achieve the targets of rapid oscillation start, high stability on all-temperature range and linearity. The interface circuit is fabricated in a 0.5 µm CMOS process and the test results show that the scale factor is 19.94 mV/°/s with an input angular ratio range of ²200°/s. The angular random walk and bias drift are 0.095°/√hr and 2.5°/hr respectively. The non-linearity can reach to 97 ppm and the zero drift and P-P value are 20°/hr and 80°/hr at the temperature from −45°C to 85°C. Meanwhile, the short stability at room temperature in one hour is 8.86°/hr (1-sigma) and the start time is less than 1 s. This design realizes a high standard with a simple structure.

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“…Recently, high performance capacitive accelerometers with micro-g resolution are attractive in inertial navigation, GPS-aided navigators for the consumer market, gravity testing in space [1,2]. This paper will introduce a fifth-order closed-loop low-noise low harmonics distortion interface circuit of AEÁ accelerometer that is used multi-bit.…”

Section: Introductionmentioning

confidence: 99%

A high performance with low harmonic distortion interface circuit of sigma-delta accelerometer

Chen

Liu

et al. 2016

IEICE Electron. Express

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A high performance interface circuit of sigma-delta accelerometer with low harmonic distortion used many kinds of circuit processing techniques is presented in this work. Multi-bit, dynamic element matching, correlated-double-sampling and electrostatic force feedback linearization circuit are used simultaneously in order to achieve the design indicators. Because of the usage of multi-bit, the design to operational amplifier (OPA) becomes easier, and only a single-stage folded-cascode amplifier is used in the modulator, the OSR is only 64. It highly reduced the difficulty of circuit. The test results indicate that the chip area is only about 10 mm 2 and the power dissipation is 10 mW with a sampling frequency of 60 kHz. The dynamic range (DR) of the system can be lower than −130 dB, the SNR and SNDR reach to −120 dB and −110 dB respectively with a resolution about 17 bits when referred to 3g full scale DC acceleration under CMOS 0.5 µm process. The dc nonlinearity of it is 0.2%. This paper realizes an approach which can both simplify the design of the interface circuit and improve the performance of it.

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Noise Analysis and Characterization of a Sigma-Delta Capacitive Microaccelerometer

Cited by 179 publications

References 17 publications

A virtually floating dual-mass accelerometer

A virtually floating dual-mass accelerometer

A high performance quartz vibrating gyroscope interface circuit driven by square-wave

A high performance with low harmonic distortion interface circuit of sigma-delta accelerometer

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