Nitrogen doping of ZnSe with trimethylsilylazide, triallylamine or bisditrimethylsilylamidozinc during metalorganic vapour phase epitaxy

True Blue Inorganic Optoelectronic Devices

“…Replacing the ethyl with trimethylsilyl greatly improves the stability of the azide; consequentially, only low levels of nitrogen incorporation were observed. [114] N 2 gas can be used as the carrier gas, and is not believed to contribute to the active doping species, as Park et al documented. [115] However, Hishida et al observed contrary effects and published N 2 gas doping experiments (without activation) in which nitrogen levels of 10 20 cm ±3 and net acceptor concentrations of 10 17 cm ±3 were obtained.…”