NiTi shape memory alloy thin film micro-cantilevers array

Chung, C.Y.; Chan, P.M.

doi:10.1016/j.tsf.2011.01.116

Cited by 7 publications

(2 citation statements)

References 8 publications

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“…The annealing process is performed at high temperature (normally over 450°C) to form a crystalline structure of NiTi, e.g., martensite, austenite, and R-phase. The annealing is typically performed by heating an as-deposited Ni-Ti thin film in a high vacuum furnace ( Ref 11,15,16). However, there are several other possibilities for annealing such as heating by high-power laser (Ref 17), heating by halogen lamp (Ref 18), and heating in a quartz tube furnace with inert gas overflow ( Ref 12).…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Nitinol-Copper Shape Memory Alloy Bimorph Actuators

Wongweerayoot

Srituravanich

Pimpin

2014

J. of Materi Eng and Perform

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This study aims to examine the effect of annealing conditions on nitinol (NiTi) characteristics and applies this knowledge to fabricate a NiTi-copper shape memory alloy bimorph actuator. The effect of the annealing conditions was investigated at various temperatures, i.e., 500, 600, and 650°C, for 30 min. With the characterizations using x-ray diffraction, energy dispersive spectroscopy, and differential scanning calorimetry techniques, the results showed that annealing temperatures at 600 and 650°C were able to appropriately form the crystalline structure of NiTi. However, at these high annealing temperatures, the oxide on a surface was unavoidable. In the fabrication of actuator, the annealing at 650°C for 30 min was chosen, and it was performed at two pre-stressing conditions, i.e., straight and curved molds. From static and dynamic response experiments, the results suggested that the annealing temperature significantly affected the deflection of the actuator. On the other hand, the effect of pre-stressing conditions was relatively small. Furthermore, the micro gripper consisting of two NiTi-copper bimorph actuators successfully demonstrated for the viability of small object manipulation as the gripper was able to grasp and hold a small plastic ball with its weight of around 0.5 mg.

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Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Nitinol-Copper Shape Memory Alloy Bimorph Actuators

Wongweerayoot

Srituravanich

Pimpin

2014

J. of Materi Eng and Perform

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“…[5,6]. With the rapid development of electronic chips, micro-sensors, micro-machinery and micro-electro-mechanical systems (MEMS), it is necessary to develop the SMAs with smaller volume and outstanding properties [7][8][9]. In order to meet the above requirement, the shape memory thin films with higher functional performances have been investigated.…”

Section: Introductionmentioning

confidence: 99%

The microstructure of Ti-Ni-Cu shape memory thin films: A review

Feng

Wang

et al. 2022

Materials Science and Technology

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Ti-Ni-Cu shape memory thin films have attracted more attention as a result of the perfect combination of various advantages such as narrower thermal hysteresis, superior thermal cycling stability, higher strength and long-term functional fatigue. The prominent functional properties were closely related to their specific crystal structure and microstructural features. In the present paper, the microstructure in equiatomic, Ti-rich and (Ni,Cu)-rich shape memory thin films were reviewed. In addition, the corresponding results including martensitic transformation, microstructure and strain recovery characteristics of Ti-Ni-Cu thin films without precipitates and containing different types of precipitates were summarised. Besides, the mechanisms for obtaining the outstanding functional properties are discussed and reviewed, which can offer the theoretical basis to the design of Ti-Ni-Cu shape memory alloy thin film micro actuators with excellent performances.

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