1992
DOI: 10.1007/bf02745298
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Nickel silicide contact for silicon solar cells

Abstract: Electroless nickel metallization on textured front surface is carried out to fabricate large area (13~) efficient silicon solar cells. It is estabh:hed through XPS analysis that NiSi is formed at the front grid contact on the texturized surface at relatively low temperature leading to a low value of series resistance of the solar cells.

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Cited by 7 publications
(3 citation statements)
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“…Our wafers satisfied the conditions of high conductivity, low shadowing, low contact resistance, and minimal resistance loss. [18][19][20][21][22][23]. To assess the selective properties, we conducted a deposition experiment using a crystalline-shaped solar-cell wafer identical to the one shown in Fig.…”
Section: Experiments and Discussionmentioning
confidence: 99%
“…Our wafers satisfied the conditions of high conductivity, low shadowing, low contact resistance, and minimal resistance loss. [18][19][20][21][22][23]. To assess the selective properties, we conducted a deposition experiment using a crystalline-shaped solar-cell wafer identical to the one shown in Fig.…”
Section: Experiments and Discussionmentioning
confidence: 99%
“…The processes and raw materials used for these solar cells include FZ (float zone) wafers, buried metal contacts, selective diffusion and PdCl 2 activation for Ni deposition. Bandyopadhyay et al [23] and Vitanov et al [24], fabricated the Ni/Cu plated front contact solar cells using conventional fabrication steps of texturization, diffusion, anti reflection coating (ARC) deposition of silicon nitride (Si x N y ) and back surface field (BSF). However, the front metal contacts were fabricated using plasma and vacuum processes.…”
Section: Introductionmentioning
confidence: 99%
“…6,7 To avoid these detrimental effects, annealing of nickel seed layer is typically done in temperature range of 300-500 • C for short * Author for correspondence (mehul.c.raval@iitb.ac.in) durations. 3,4,[8][9][10][11][12] However, a clear relation does not exist between annealing conditions and nickel silicide formation with associated contact resistivity of the interface, though studies have been performed for higher temperature ranges. 13,14 In the present work, a thin electroless nickel seed layer is deposited with and without Pd activation to study silicide formation and contact resistivity at the interface for annealing durations of 30-60 s in temperature range of 400-420 • C. Phase identification studies for the seed layer and silicides is performed using X-ray diffraction (XRD) technique.…”
Section: Introductionmentioning
confidence: 99%