Ni electroplating on a resist micro-machined by proton beam writing

Uchiya, N.; Furuta, Y.; Nishikawa, Hiroyuki; Watanabe, Tohru; Haga, J.; Satoh, Takahiro; Oikawa, Masakazu; Ishii, Yasuyuki; Kamiya, Tomihiro

doi:10.1007/s00542-007-0549-0

Cited by 18 publications

(2 citation statements)

References 20 publications

(21 reference statements)

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“…24) High-aspect-ratio micrometer-sized structures were successfully generated on polymers by highenergy proton impact. 25,26) These effects on the materials were clearly observed after the postprocedure of wet or dry etching. In contrast, in this study, we attempt direct writing on diamond without any pre-or post-processes to fabricate carbonized microstructures.…”

Section: Proton Beam Writing Systemmentioning

confidence: 94%

Ion-Beam-Induced Luminescence Analysis as Diagnostic Tool for Microstructure Patterning on Diamond by Proton Beam Writing

Kada

Yokoyama

Koka

et al. 2012

Jpn. J. Appl. Phys.

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To date, various connection rerouting methods for connection-oriented mobile networks have been proposed. The previous methods, however, are limited to specific topologies or environments. In this paper, we propose the connection-information-based rerouting widely applicable to various connection-oriented mobile networks. This method requires neither a specific topology nor a complex connection, enables fast rerouting, provides appropriate route optimality, and can be extended easily.

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Section: Proton Beam Writing Systemmentioning

confidence: 94%

Ion-Beam-Induced Luminescence Analysis as Diagnostic Tool for Microstructure Patterning on Diamond by Proton Beam Writing

Kada

Yokoyama

Koka

et al. 2012

Jpn. J. Appl. Phys.

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“…Proton beam writing (PBW) is a powerful prototyping tool for direct-writing lithography that uses focused megaelectronvolt (MeV) ion beams to pattern high-aspect-ratio microor nanostructures on a wide variety of materials such as polymers, insulators, and semiconductors. [1][2][3][4] Two-or three-dimensional microscale structures with high aspect ratios 2) have been fabricated on poly(methyl methacrylate) (PMMA) 5,6) and SU-8 7,8) for a wide range of applications. Combined ion beam analysis and in situ diagnostics for PBW in diamond in a single PBW system has been developed.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and evaluation of flexible Mach–Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam

Parajuli

Saruya

Akutzu

et al. 2016

Jpn. J. Appl. Phys.

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A flexible Mach–Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton microbeam was used to fabricate a 40 × 20 mm2 MZ optical waveguide structure with a width of 8 µm embedded in a PDMS film for the single-mode light propagation of infrared (IR) laser light. The structure was measured by ion-beam-induced luminescence (IBIL) analysis and the beam fluence was optimized according to the IBIL intensity obtained from the waveguide structure. The entire structure of the MZ waveguide functioned well, confirmed by observing the near-field pattern (NFP) with a tunable IR laser (1.55 µm) for different PDMS film conditions. The optical throughput measurements for different sample configurations were obtained under continuous mechanical stress and a relatively low optical loss was observed at an inclination angle of 16°. Our results suggest that the MZ waveguide can be used for optical interlink connections under continuous mechanical stress.

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Phosphane Copper(I) Dicarboxylates: Synthesis and Their Potential Use as Precursors for the Spin‐coating Process in the Deposition of Copper

Jakob

Rüffer

Ecorchard

et al. 2010

Zeitschrift anorg allge chemie

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Dicopper dicarboxylates [(R3P)mCuXCu(PR3)m] (5a, X = O2CCO2, R = Ph, m = 2; 5b, X = O2CCO2, R = nBu, m = 3) were prepared by treatment of [Cu2O] (1a) with HO2CCO2H (2a) in presence of PR3 (4a, R = Ph; 4b, R = nBu). A further synthesis approach to mono‐ and dicopper dicarboxylates is given using an electrolysis cell equipped with Cu electrodes and charged with acids H2X and phosphanes R3P. Without addition of a base mononuclear [(nBu3P)mCuXH] (6a, m = 3, XH = O2CCO2H, 6b, m = 3, XH = O2CCH2CO2H, 6c, m = 3, XH = O2CCH2CH2CO2H, 6d, m = 2, XH = O2C‐2‐C5H4N‐6‐CO2H) was formed, whereas in presence of NEt3 (3), the dicopper systems [(R3P)mCuXCu(PR3)m] (5a, X = O2CCO2, R = Ph, m = 2; 5b, X = O2CCO2, R = nBu, m = 3; 5c, X = O2CCH2CO2, R = nBu, m = 3; 5d, X = O2CCH2CH2CO2, R = nBu, m = 3; 5e, X = O2C‐2‐C5H4N‐6‐CO2, R = nBu, m = 3) were produced. When 6a reacted with [(tmeda)Zn(nBu)2] (7), trimetallic [(tmeda)Zn((nBu3P)3CuO2CCO2)2] (8) was accessible. In this heterobimetallic complex the Zn(tmeda) unit spans two CuO2CCO2 entities. The molecular structures of 5a, 6a and 6d in the solid state were determined by single X‐ray structure analysis. Complexes 5a and 6a are monomers, whereas 6d creates in the solid state a linear open chain coordination polymer by hydrogen bridge formation. Characteristic for 6d is the somewhat distorted trigonal bipyrimidal arrangement around the copper atom with the nBu3P ligands in axial and the C5H3NCO2H oxygen and nitrogen atoms in equatorial positions. In 5a the oxalate connectivity binds in a μ‐1,2,3,4 fashion being part of a planar Cu2(oxalate) core. TG studies of several mono‐ and dicopper dicarboxylates were carried out. Release of the PR3 ligands is recognized and the remaining Cu‐(di)carboxylate unit decomposes to afford elemental copper and CO2. The deposition of copper onto pieces of PVD‐Cu oxidized silicon wafers by applying the spin‐coating process and using 5c and 5d as precursors is discussed.

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Ni electroplating on a resist micro-machined by proton beam writing

Cited by 18 publications

References 20 publications

Ion-Beam-Induced Luminescence Analysis as Diagnostic Tool for Microstructure Patterning on Diamond by Proton Beam Writing

Ion-Beam-Induced Luminescence Analysis as Diagnostic Tool for Microstructure Patterning on Diamond by Proton Beam Writing

Fabrication and evaluation of flexible Mach–Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam

Phosphane Copper(I) Dicarboxylates: Synthesis and Their Potential Use as Precursors for the Spin‐coating Process in the Deposition of Copper

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