2002
DOI: 10.1088/0022-3727/35/7/315
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NH3and NHx<3radicals synthesis downstream a microwave discharge sustained in an Ar-N2-H2gas mixture. Study of surface reactive processes and determination of rate constants

Abstract: NH3 and NHx<3 radicals are produced downstream a microwave discharge containing Ar-N2-H2 gas mixture. The chemical mechanism under investigation consists of heterogenous reactions between adsorbed species NH or NH2 (denoted NHs and NH2s) and H or H2 flowing downstream the discharge. NHs is adsorbed on the stainless steel reactor wall and reacts with H or H2 producing NH2s or . Then, part of NH2s produced reacts with H atoms producing ; another part is desorbed from the tube wall: . We assume that … Show more

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Cited by 40 publications
(52 citation statements)
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References 21 publications
(46 reference statements)
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“…The latter is also of interest in nuclear fusion research where N 2 is puffed into the plasma edge of the hydrogen plasma to reduce the local heat load of the so-called divertor region [14][15][16][17][18][19] . Argon addition to H 2 -N 2 plasmas is applied in fusion plasmas 16,17 as well as for industrial nitriding treatments of ferrous and nonferrous materials for improving the mechanical properties or corrosion resistance 20,21 . In many of these plasmas the dominant plasma-surface-interaction processes are driven by radical species or ions or a synergistic interaction, respectively, between them.…”
Section: Introductionmentioning
confidence: 99%
See 2 more Smart Citations
“…The latter is also of interest in nuclear fusion research where N 2 is puffed into the plasma edge of the hydrogen plasma to reduce the local heat load of the so-called divertor region [14][15][16][17][18][19] . Argon addition to H 2 -N 2 plasmas is applied in fusion plasmas 16,17 as well as for industrial nitriding treatments of ferrous and nonferrous materials for improving the mechanical properties or corrosion resistance 20,21 . In many of these plasmas the dominant plasma-surface-interaction processes are driven by radical species or ions or a synergistic interaction, respectively, between them.…”
Section: Introductionmentioning
confidence: 99%
“…Jang and Lee 29 previously examined a few aspects in an inductively coupled H 2 -N 2 plasma by measuring n e , T e and ion signal intensities. In addition, there exists a variety of studies about H 2 -N 2 plasmas in which the densities of background gas species 13,20,[30][31][32][33] , radicals 7,8,20,32,34 , electrons 34,35 and ion signals 7,36 as well as the surface loss probability of H and N (see Ref. 7 ) were reported.…”
Section: Introductionmentioning
confidence: 99%
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“…The formation of ammonia is generally ascribed to stepwise addition reactions between adsorbed nitrogen and hydrogen containing radicals at the surface and incoming N and H containing radicals. [15][16][17][18] To gain a better understanding of plasma-surface intera͒ Author to whom correspondence should be addressed; Electronic mail: r.engeln@tue.nl actions that take place during the generation of stable molecules, we have chosen to investigate the formation of ammonia in plasmas of mixtures of nitrogen and hydrogen in more detail. Plasmas containing nitrogen and hydrogen are also extensively studied because of their widespread applications in research and industrial environments.…”
Section: Introductionmentioning
confidence: 99%
“…The combination of H 2 , N 2 , and Ar is used commonly in industrial applications and has been explored by several researchers. [26][27][28][29] In this work the combination of H 2 and N 2 shows that the T e is dominated by the presence of N 2 ( Figure 10). The T e in an Ar/3% N 2 plasma was relatively stable with increasing H 2 concentration.…”
Section: Addition Of H 2 and N 2 To Control The Electron Energy Distrmentioning
confidence: 53%